公开(公告)号：EP2013378B1

公开(公告)日：2011-07-06

申请号：EP07776247.4

申请日：2007-04-25

申请人： Mitsubishi Cable Industries, Ltd. ,  Spansion LLC

发明人： IKEDA, Takeshi ,  KOIZUMI, Kazuo ,  TAKEDA, Hiroyuki ,  KOYAMA, Tetsuo ,  WATANABE, Keiichi

IPC分类号： C23F1/00 ,  H01L21/306

CPC分类号： C23C16/4412

摘要： An exhaust system includes: an exhaust pressure controller interposed in an exhaust passage and including: a pipe body including a side peripheral wall in which at least one port is formed; and a gas introduction wall for introducing an exhaust gas flowing from an upstream side of the pipe body so that the exhaust gas flows downstream without coming into direct contact with the port and vicinity thereof, one face of the gas introduction wall forming a pressure control path together with an inner face of the side peripheral wall while another face of the gas introduction wall forming an exhaust gas path along which the exhaust gas flows. The port communicates with the pressure control path, and the pressure control path communicates with the exhaust gas path at part downstream of the port.

公开(公告)号：EP2013378A2

公开(公告)日：2009-01-14

申请号：EP07776247.4

申请日：2007-04-25

申请人： Mitsubishi Cable Industries, Ltd. ,  Osaka Rasenkan Kogyo Co., Ltd. ,  Spansion LLC ,  Spansion Japan Limited

发明人： IKEDA, Takeshi ,  KOIZUMI, Kazuo ,  TAKEDA, Hiroyuki ,  KOYAMA, Tetsuo ,  WATANABE, Keiichi

IPC分类号： C23F1/00 ,  H01L21/306

CPC分类号： C23C16/4412

摘要： An exhaust system includes: an exhaust pressure controller interposed in an exhaust passage and including: a pipe body including a side peripheral wall in which at least one port is formed; and a gas introduction wall for introducing an exhaust gas flowing from an upstream side of the pipe body so that the exhaust gas flows downstream without coming into direct contact with the port and vicinity thereof, one face of the gas introduction wall forming a pressure control path together with an inner face of the side peripheral wall while another face of the gas introduction wall forming an exhaust gas path along which the exhaust gas flows. The port communicates with the pressure control path, and the pressure control path communicates with the exhaust gas path at part downstream of the port.

摘要翻译： 一种排气系统，包括：排气压力控制器，置于排气通道中并且包括：管体，该管体包括形成有至少一个端口的侧周壁; 以及气体导入壁，其用于导入从管体的上游侧流动的废气，使得废气不向下游侧流动而直接接触到其下游侧，气体导入壁的一个面形成压力控制路径 并与侧周壁的内表面同时形成废气流过的废气通道的气体导入壁的另一面。 端口与压力控制路径连通，并且压力控制路径在端口的下游部分与排气路径连通。