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公开(公告)号：EP3474065A1
公开(公告)日：2019-04-24
申请号：EP18200765.8
申请日：2018-10-16
申请人： Mitutoyo Corporation
摘要： A variable focal length lens apparatus (1) includes an objective lens (11) and an imaging lens (12) that are aligned on the same optical axis (A); a front side lens system (21) and a rear side lens system (22) that are disposed in a section between the objective lens and the imaging lens on the optical axis, and change a refractive index in accordance with an input drive signal; and a diaphragm (23) disposed in the section between the front side lens system and the rear side lens system on the optical axis.
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公开(公告)号：EP2369293B1
公开(公告)日：2018-10-24
申请号：EP11157547.8
申请日：2011-03-09
申请人： Mitutoyo Corporation
CPC分类号： G01B9/02068 , G01B9/02057 , G01B9/0209
摘要： A light-interference measuring apparatus including: a light source of a broad band light; an objective lens section to branch an optical path of the broad band light into a reference optical path including a reference mirror and a measuring optical path including a measuring object and to output a superposed wave of two branched lights; and an optical path length changing section to change an optical path length of either the reference optical path or the measuring optical path; wherein the objective lens section includes a phase difference control member to control a phase difference between the reference light and the object light to generate destructive interference fringes at a position of zero-path difference between the reference optical path and the measuring optical path, and a minimum luminance position detecting section to detect minimum luminance position of the destructive interference fringes.
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公开(公告)号：EP2369293A1
公开(公告)日：2011-09-28
申请号：EP11157547.8
申请日：2011-03-09
申请人： Mitutoyo Corporation
CPC分类号： G01B9/02068 , G01B9/02057 , G01B9/0209
摘要： A light-interference measuring apparatus including: a light source of a broad band light; an objective lens section to branch an optical path of the broad band light into a reference optical path including a reference mirror and a measuring optical path including a measuring object and to output a superposed wave of two branched lights; and an optical path length changing section to change an optical path length of either the reference optical path or the measuring optical path; wherein the objective lens section includes a phase difference control member to control a phase difference between the reference light and the object light to generate destructive interference fringes at a position of zero-path difference between the reference optical path and the measuring optical path, and a minimum luminance position detecting section to detect minimum luminance position of the destructive interference fringes.
摘要翻译： 1.一种光干涉测量装置，包括：宽带光的光源; 物镜部分，用于将宽带光的光路分支成包括参考反射镜的参考光路和包括测量对象的测量光路，并输出两个分支光的叠加波; 以及光路长度变更部，其改变基准光路或测量光路的光路长度; 其中所述物镜部分包括相位差控制部件，用于控制所述参考光与所述物体光之间的相位差，以在所述参考光路和所述测量光路之间的零路径差的位置处产生相消干涉条纹，以及 最小亮度位置检测部分，用于检测破坏性干涉条纹的最小亮度位置。
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公开(公告)号：EP2058643B1
公开(公告)日：2018-12-26
申请号：EP08168535.6
申请日：2008-11-06
申请人： Mitutoyo Corporation
发明人： Kubo, Koji
IPC分类号： G01Q60/22
CPC分类号： G01Q60/22
摘要： A noncontact measurement probe 12 has surface plasmon conversion means 24 provided at an extremity of an optical fiber 26. The surface plasmon conversion means 24 has a metal film 36, a minute aperture 38 located in line with an optical axis 42 of the optical fiber 26 on the metal film 36, and a grating 40 that is provided on an exit-side surface 36b of the metal film 36 and that has concentric grooves around the aperture 38. Light 28 from the optical fiber 26 is converted into surface plasmon by means of the metal film 36. A light spot 30 is radiated on a location spaced, along an optical axis "c" of the aperture 38, from the surface plasmon conversion means 24 by a desired distance "f" determined from the width and pitch of grooves, by means of interference among light beams acquired as a result of the surface plasmon being re-converted by respective grooves of the grating 40.
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公开(公告)号：EP2058643A3
公开(公告)日：2010-03-10
申请号：EP08168535.6
申请日：2008-11-06
申请人： Mitutoyo Corporation
发明人： Kubo, Koji
CPC分类号： G01Q60/22
摘要： A noncontact measurement probe 12 has surface plasmon conversion means 24 provided at an extremity of an optical fiber 26. The surface plasmon conversion means 24 has a metal film 36, a minute aperture 38 located in line with an optical axis 42 of the optical fiber 26 on the metal film 36, and a grating 40 that is provided on an exit-side surface 36b of the metal film 36 and that has concentric grooves around the aperture 38. Light 28 from the optical fiber 26 is converted into surface plasmon by means of the metal film 36. A light spot 30 is radiated on a location spaced, along an optical axis "c" of the aperture 38, from the surface plasmon conversion means 24 by a desired distance "f" determined from the width and pitch of grooves, by means of interference among light beams acquired as a result of the surface plasmon being re-converted by respective grooves of the grating 40.
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公开(公告)号：EP2058643A2
公开(公告)日：2009-05-13
申请号：EP08168535.6
申请日：2008-11-06
申请人： Mitutoyo Corporation
发明人： Kubo, Koji
CPC分类号： G01Q60/22
摘要： A noncontact measurement probe 12 has surface plasmon conversion means 24 provided at an extremity of an optical fiber 26. The surface plasmon conversion means 24 has a metal film 36, a minute aperture 38 located in line with an optical axis 42 of the optical fiber 26 on the metal film 36, and a grating 40 that is provided on an exit-side surface 36b of the metal film 36 and that has concentric grooves around the aperture 38. Light 28 from the optical fiber 26 is converted into surface plasmon by means of the metal film 36. A light spot 30 is radiated on a location spaced, along an optical axis "c" of the aperture 38, from the surface plasmon conversion means 24 by a desired distance "f" determined from the width and pitch of grooves, by means of interference among light beams acquired as a result of the surface plasmon being re-converted by respective grooves of the grating 40.
摘要翻译： 非接触测量探针12具有设置在光纤26的末端的表面等离子体激元转换装置24.表面等离子体激元转换装置24具有金属膜36，微孔38与光纤26的光轴42成一直线 在金属膜36上设置有光栅40，光栅40设置在金属膜36的出射侧表面36b上，并且具有围绕孔38的同心槽。光纤26的光28通过 金属膜36.光斑30沿着孔38的光轴“c”从表面等离子体激元转换装置24辐射所需的距离“f”，从槽的宽度和间距确定 通过作为由光栅40的相应凹槽重新转换的表面等离子体激元的结果获得的光束之间的干涉。
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