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    MICROMECHANICAL SENSOR OF ANGULAR VELOCITY
    2.
    发明公开
    MICROMECHANICAL SENSOR OF ANGULAR VELOCITY 审中-公开
    微小机械角速度传感器

    公开(公告)号：EP3256813A1

    公开(公告)日：2017-12-20

    申请号：EP16704706.7

    申请日：2016-02-08

    申请人： Murata Manufacturing Co., Ltd.

    发明人： PIIRAINEN, Tommi

    IPC分类号： G01C19/5747

    CPC分类号： G01C19/5712 ,  G01C19/5747

    摘要： A micromechanical device includes four open drive frames and four detection masses for double differentially detecting angular velocity about a single axis aligned with the plane of the micromechanical device. A coupling frame system couples the four open drive frames into a synchronized anti-phase driving motion. In each four pairs of adjacent open drive frames, two adjacent open drive frames move in phases opposite to each other. Axes of linear driving motion of each of the drive frames are aligned. Anti-phase synchronized driving motion of the open drive frames is relayed through a spring arrangement to an anti-phase synchronized driving motion of the four detection masses. An inner coupling lever system couples the four detection masses into a synchronized anti-phase detection motion. In each four pairs of adjacent detection masses, phases of two adjacent detection masses are opposite. Axes of linear detection motion of the detection masses are aligned.

    MICROMECHANICAL SENSOR OF ANGULAR VELOCITY
    3.
    发明公开
    MICROMECHANICAL SENSOR OF ANGULAR VELOCITY 审中-公开

    公开(公告)号：EP3256814A1

    公开(公告)日：2017-12-20

    申请号：EP16704707.5

    申请日：2016-02-08

    申请人： Murata Manufacturing Co., Ltd.

    发明人： PIIRAINEN, Tommi

    IPC分类号： G01C19/5747

    摘要： A micromechanical device includes four open drive frames (100) and four detection masses (105) for double differentially detecting angular velocity about an axis perpendicular to a plane of the micromechanical device. A coupling frame system (110, 111, 120, 121, 112, 122) couples the four open drive frames (100) into a synchronized anti-phase driving motion. Phases of each of the four pairs of adjacent open drive frames are opposite, and amplitude of the linear primary motion of the four open drive frames (100) are equal. Axes of linear driving motions of the open drive frames are aligned. Anti-phase synchronized driving motion of the open drive frames (100) is relayed through a spring arrangement (106) to an anti-phase synchronized driving motion of the four detection masses (105). An inner coupling lever system (115, 127, 128) couples the four detection masses into a synchronized anti-phase detection motion. Phases of each of the four pairs of adjacent detection masses (105) are opposite. Axes of linear detection motion of each of the detection masses (105) are aligned.

    IMPROVED QUADRATURE COMPENSATION
    5.
    发明公开
    IMPROVED QUADRATURE COMPENSATION 审中-公开
    改进磨边补偿

    公开(公告)号：EP3063498A1

    公开(公告)日：2016-09-07

    申请号：EP14799548.4

    申请日：2014-10-31

    申请人： Murata Manufacturing Co., Ltd.

    发明人： BLOMQVIST, Anssi ,  RYTKÖNEN, Ville-Pekka ,  PIIRAINEN, Tommi

    IPC分类号： G01C19/5719

    CPC分类号： G01C19/5719 ,  G01C19/56 ,  G01C19/5726

    摘要： A microelectromechanical sensor device that comprises a seismic mass, and a spring structure that defines for the seismic mass a drive direction, and a sense direction that is perpendicular to the drive direction. A capacitive transducer structure includes a stator to be anchored to a static support structure, and a rotor mechanically connected to the seismic mass. The capacitive transducer structure is arranged into a slanted orientation where a non-zero angle is formed between the drive direction and a tangent of the stator surface. The slated capacitive transducer structure creates an electrostatic force to decrease quadrature error of the linear oscillation.

    THREE AXIS GYROSCOPE
    7.
    发明公开
    THREE AXIS GYROSCOPE 有权
    三轴陀螺仪

    公开(公告)号：EP3283845A1

    公开(公告)日：2018-02-21

    申请号：EP16716911.9

    申请日：2016-04-12

    申请人： Murata Manufacturing Co., Ltd.

    发明人： PIIRAINEN, Tommi

    IPC分类号： G01C19/5733 ,  G01C19/5747

    CPC分类号： G01C19/5733 ,  G01C19/5747

    摘要： A micro-electro-mechanical device detects angular velocity, for example relating to a three axis gyroscope. The three axis gyroscope includes a two axis gyroscope structure and a one axis gyroscope structure. The gyroscope further includes a lever spring system coupling a linear drive mode oscillation of the two axis gyroscope structure and a linear drive mode oscillation of the one axis gyroscope structure into one combined primary motion. The lever spring system causes the one and two axis gyroscope structures to have equal drive mode oscillation amplitudes. A symmetrical arrangement of the lever spring system causes any reactive forces created in the lever spring system to cancel each other.