公开(公告)号：EP3961175A1

公开(公告)日：2022-03-02

申请号：EP20796367.9

申请日：2020-04-24

申请人： NAGANO KEIKI CO., LTD. ,  DENSO CORPORATION

发明人： KODAMA, Hiroshi ,  YOSHIDA, Naoki ,  MIYASHITA, Kaori ,  TAKEDA, Eiji ,  YAMADA, Nobuaki ,  TOMOMATSU, Yoshihiro ,  YANAGISAWA, Yasushi ,  MIDORIKAWA, Yusuke ,  KAMANARU, Shirou ,  YOKOYAMA, Kenichi ,  TOYODA, Inao ,  TAKEUCHI, Hisayuki ,  NIIMI, Naohisa ,  TAKAHASHI, Masao ,  URA, Yasutake ,  ASANO, Kouji ,  KAMADA, Yukihiro

IPC分类号： G01L9/06

摘要： A pressure sensor has a stem (10) in which a pressure introduction hole into which a pressure medium is introduced and a diaphragm (13) deformable according to the pressure of the pressure medium are formed, and a strain detecting element (30) which is arranged on the diaphragm (13) via an insulating film (20) and being configured to output a detection signal according to the deformation of the diaphragm (13). The strain detecting element (30) is configured to have a portion made of polysilicon. A low doping layer (23) having a higher electrical resistivity than polysilicon and a higher crystallinity than the insulating film is arranged between the insulating film (20) and the strain detecting element (30).