公开(公告)号：EP2542035A4

公开(公告)日：2017-05-31

申请号：EP11762263

申请日：2011-03-30

申请人： NAT INST FOR MATERIALS SCIENCE ,  ULVAC-PHI INC

发明人： YAMAZUI HIROMICHI ,  KOBAYASHI KEISUKE ,  IWAI HIDEO ,  KOBATA MASAAKI

IPC分类号： G01N23/227 ,  G21K1/06 ,  G21K7/00 ,  H01J35/28 ,  H01J35/30

CPC分类号： G01N23/2273 ,  G01N2223/204 ,  G01N2223/206 ,  G21K1/06 ,  G21K7/00 ,  H01J35/28 ,  H01J35/30 ,  H01J2235/081 ,  H01J2235/086 ,  H01J2235/163

摘要： [Object] The present invention provides an X-ray irradiation device capable of adjusting the energy of X-rays in a wide range, and an analysis device equipped with the X-ray irradiation device. [Solving Means] An X-ray irradiation device according to an embodiment of the present invention focuses X-rays emitted from an X-ray generation mechanism to a predetermined focal position by a focusing mechanism. The X-ray generation mechanism has a structure which generates a plurality of X-rays having different wavelengths. The focusing mechanism has a structure in which the plurality of X-rays are focused to the same focal position by focusing elements having diffraction characteristics suitable for the wavelengths of the respective X-rays generated by the X-ray generation mechanism.

摘要翻译： 发明内容本发明提供一种能够在宽范围内调整X射线的能量的X射线照射装置以及具备该X射线照射装置的分析装置。 [解决手段]根据本发明实施例的X射线照射装置通过聚焦机构将从X射线产生机构发射的X射线聚焦到预定焦点位置。 X射线产生机构具有产生具有不同波长的多个X射线的结构。 聚焦机构具有这样的结构，其中通过具有适合于由X射线产生机构产生的各个X射线的波长的衍射特性的聚焦元件将多个X射线聚焦到相同的焦点位置。