公开(公告)号：EP1037073A3

公开(公告)日：2002-12-18

申请号：EP00302125.0

申请日：2000-03-15

申请人： NEC CORPORATION ,  NGK INSULATORS, LTD.

发明人： Nakabayashi, Yukinobu, c/o NEC Corporation ,  Kitamura, Mitsuhiro, c/o NEC Corporation ,  Kawagushi, Tatsuo ,  Kondo, Jungo ,  Imaeda, Minoru, Furora Chiyoda 701

IPC分类号： G02B6/13

CPC分类号： G02B6/1342

摘要： A process for producing an optical waveguide element by thermally diffusing a metal element or a metallic compound into a substrate having a photoelectric effect, includes the steps of: forming a waveguide pattern on the substrate, said waveguide pattern comprising the metal element or the metallic compound; forming a film on a main plane of the substrate and covering the entire waveguide pattern, the film having an electro-optic effect; and effecting the thermal diffusion of the metallic element and the metallic compound.

摘要翻译： 通过将金属元素或金属化合物热扩散到具有光电效应的基板中来制造光波导元件的方法包括以下步骤：在基板上形成波导图案，所述波导图案包括金属元素或金属化合物 ; 在基板的主平面上形成膜并覆盖整个波导图案，该膜具有电光效应; 并且实现金属元素和金属化合物的热扩散。