专利检索 ap:("NEC Electronics Corporation") AND inv:"Kitajima, Hiroshi, c/o NEC Corporation" 第 1 页

1.

发明授权
Electrolytic processing apparatus 失效
标题翻译：电解处理装置

公开(公告)号：EP0674026B1

公开(公告)日：2004-07-14

申请号：EP95301910.6

申请日：1995-03-22

申请人： NEC Electronics Corporation

发明人： Kitajima, Hiroshi, c/o NEC Corporation , Aoki, Hidemitsu, c/o NEC Corporation , Hamano, Haruto, c/o NEC Corporation , Shiramizu, Yoshimi, c/o NEC Corporation , Nakamori, Masaharu, c/o NEC Corporation , Watanabe, Kaori, c/o NEC Corporation , Seo, Hirofumi, c/o NEC Corporation , Shimizu, Yuji, c/o NEC Corporation , Iuchi, Makoto, c/o NEC Corporation , Sasaki, Yasusuhi, c/o NEC Corporation , Ohta, Naomi, c/o NEC Corporation , Makoto, Morita, c/o NEC Corporation

IPC分类号： C25F7/00 , H01L21/00 , C25F3/12 , C02F1/46

CPC分类号： H01L21/67086 , B08B3/08 , C02F1/045 , C02F1/4618 , C02F2201/4611 , C02F2201/46115 , C02F2201/4612 , C02F2201/4618 , C02F2201/46185 , C02F2201/4619 , C02F2209/04 , C02F2209/06 , C02F2209/42 , C02F2301/066 , H01L21/00 , H01L21/67057