专利检索 ap:("NHK Spring Co., Ltd.") AND inv:"HANAMACHI Toshihiko" 第 1 页

1.

发明公开
SUBSTRATE SUPPORTING UNIT AND FILM FORMING DEVICE HAVING SUBSTRATE SUPPORTING UNIT 审中-公开

公开(公告)号：EP3591690A1

公开(公告)日：2020-01-08

申请号：EP18760416.0

申请日：2018-01-30

申请人： NHK Spring Co., Ltd.

发明人： TAKAHARA Go , HANAMACHI Toshihiko , TATSUMI Arata

IPC分类号： H01L21/31 , H01L21/3065 , H01L21/683 , H01L21/203

摘要： A substrate supporting unit is provided. The substrate supporting unit possesses a shaft, a first heater, and a stage. The first heater is located in the shaft and is configured to heat an upper portion of the shaft. The stage is located over the shaft and includes a first plate, a second plate over the first plate, and a second heater between the first plate and the second plate.