GLASS PROCESSING METHOD USING LASER
    1.
    发明授权
    GLASS PROCESSING METHOD USING LASER 有权
    GLASBEARBEITUNGSVERFAHREN麻省理工LASER

    公开(公告)号:EP1990125B1

    公开(公告)日:2011-10-12

    申请号:EP06714314.9

    申请日:2006-02-22

    摘要: A glass processing method comprising steps (i), (ii) carried out in the order mentioned. In step (i), a laser pulse (11) with a wavelength λ is condensed by a lens and is applied to a glass plate (12) to form an altered portion (13) at the portion, irradiated with a laser pulse (11), of the glass plate (12). In step (ii), the altered portion (13) is etched by using an etchant having an etching rate larger for the altered portion (13) than that for the glass plate (12). The laser beam used includes the following conditions: The pulse width of a laser pulse (11) ranges from 1ns to 200ns, with a wavelength λ being up to 535nm. The absorption coefficient of the glass plate (12) at a wavelength λ is up to 50cm-1. A value obtained from a lens focal distance L (mm) divided by the beam diameter D (mm) of the laser pulse (11) when entering the lens is at least 7.

    GLASS PROCESSING METHOD USING LASER AND PROCESSING DEVICE
    2.
    发明公开
    GLASS PROCESSING METHOD USING LASER AND PROCESSING DEVICE 有权
    GLASBEARBEITUNGSVERFAHREN MIT LASER

    公开(公告)号:EP1990125A1

    公开(公告)日:2008-11-12

    申请号:EP06714314.9

    申请日:2006-02-22

    摘要: A glass processing method comprising steps (i), (ii) carried out in the order mentioned. In step (i), a laser pulse (11) with a wavelength λ is condensed by a lens and is applied to a glass plate (12) to form an altered portion (13) at the portion, irradiated with a laser pulse (11), of the glass plate (12). In step (ii), the altered portion (13) is etched by using an etchant having an etching rate larger for the altered portion (13) than that for the glass plate (12). The laser beam used includes the following conditions: The pulse width of a laser pulse (11) ranges from 1ns to 200ns, with a wavelength λ being up to 535nm. The absorption coefficient of the glass plate (12) at a wavelength λ is up to 50cm -1 . A value obtained from a lens focal distance L (mm) divided by the beam diameter D (mm) of the laser pulse (11) when entering the lens is at least 7.

    摘要翻译: 一种玻璃加工方法,包括按照上述顺序进行的步骤(i),(ii)。 在步骤(i)中,具有波长»的激光脉冲(11)被透镜冷凝,并被施加到玻璃板(12),以在该部分处形成改变部分(13),用激光脉冲(11 ),玻璃板(12)。 在步骤(ii)中,通过使用对于改变部分(13)的蚀刻速率大于玻璃板(12)蚀刻速率的蚀刻剂来蚀刻改变部分(13)。 使用的激光束包括以下条件:激光脉冲(11)的脉冲宽度范围为1ns至200ns,波长»达535nm。 玻璃板(12)在波长λ处的吸收系数高达50cm -1。 从进入透镜时的透镜焦距L(mm)除以激光脉冲(11)的光束直径D(mm)得到的值为7以上。