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    MEMS DEVICE AND METHOD FOR CALIBRATING A MEMS DEVICE
    1.
    发明公开
    MEMS DEVICE AND METHOD FOR CALIBRATING A MEMS DEVICE 审中-公开

    公开(公告)号：EP3323778A1

    公开(公告)日：2018-05-23

    申请号：EP16306538.6

    申请日：2016-11-22

    申请人： NXP USA, Inc.

    发明人： TEO, Yean Ling ,  GEISBERGER, Aaron A. ,  CORNIBERT, Laurent

    IPC分类号： B81B7/00

    摘要： A microelectromechanical systems (MEMS) device and a method for calibrating a MEMS device. The device includes a first semiconductor substrate including at least one MEMS component. The device also includes an application specific integrated circuit (ASIC) comprising a second semiconductor substrate. The second semiconductor substrate is attached to the first semiconductor substrate. The second semiconductor substrate includes at least one piezoresistive strain gauge. Each piezoresistive strain gauge includes at least one doped semiconductor region having a resistivity that is determined by a strain on said doped semiconductor region. The second semiconductor substrate also includes a circuit for evaluating a trim algorithm for the at least one MEMs component using one or more output values received from the at least one piezoresistive strain gauge.

    IN-BAND BEATING REMOVAL FOR A MEMS GYROSCOPE
    3.
    发明授权
    IN-BAND BEATING REMOVAL FOR A MEMS GYROSCOPE 有权
    针对MEMS陀螺仪的带内跳动

    公开(公告)号：EP3071931B1

    公开(公告)日：2017-08-30

    申请号：EP13859593.9

    申请日：2013-11-22

    申请人： NXP USA, Inc.

    发明人： CASSAGNES, Thierry ,  BEAULATON, Hugues ,  CORNIBERT, Laurent ,  TEO, Yean Ling

    IPC分类号： G01C19/5726 ,  G06F1/08

    CPC分类号： G01C19/5726 ,  G01C19/04 ,  G06F1/08 ,  G06F1/1694 ,  H04L7/033 ,  H04L7/06

    摘要： A vibration gyroscope circuitry (VCIRC) connectable to a vibrating MEMS gyroscope (VMEMS). The circuitry comprises drive circuitry (DRIVE) arranged to drive, when the circuitry is connected, the vibration MEMS gyroscope (VMEMS) and a measurement unit (DMU) which provides a drive measurement voltage signal (DMV) forming a measure of a displacement of a mass along a drive axis. A sense circuitry (SENSE) is arranged to process a sense measurement signal of the vibration MEMS gyroscope (VMEMS) forming a measure for a displacement of the mass along a sense axis. A digital sample clock generator (SCG) is arranged to generate a sample clock signal (SCLK) from an input signal (FDxy) derivable from a drive measurement voltage signal (DMV). The sample clock generator (SCG) comprises an oscillator (HFOSC) arranged to generate a master clock (MOSC), and a counter unit (OSCCNTR) arranged to count master clock periods during one period of the input signal. The clock generator also comprises a number count monitor (NCM) arranged to determine during how many input signal periods the number count stays constant, and to compare the number of constant periods (Ncp) with a critical number of constant periods (Ncp_crit). A frequency shifter (FSH) will trigger the oscillator to shift the master clock frequency whenever the number count monitor (NCM) has determined that the number of constant periods (Ncp) exceeds the critical number of constant periods (Ncp_crit).

    摘要翻译： 振动陀螺仪电路（VCIRC）可连接到振动MEMS陀螺仪（VMEMS）。 该电路包括驱动电路（驱动器），该驱动电路被布置成当连接电路时驱动振动MEMS陀螺仪（VMEMS）和提供驱动器测量电压信号（DMV）的测量单元（DMU），该驱动器测量电压信号形成 沿驱动轴的质量。 感测电路（SENSE）被布置为处理振动MEMS陀螺仪（VMEMS）的感测测量信号，形成沿着感测轴线的质量位移的量度。 数字采样时钟发生器（SCG）被布置为从可从驱动测量电压信号（DMV）导出的输入信号（FDxy）中产生采样时钟信号（SCLK）。 采样时钟发生器（SCG）包括设置为产生主时钟（MOSC）的振荡器（HFOSC）和设置为在输入信号的一个周期期间对主时钟周期进行计数的计数器单元（OSCCNTR）。 时钟发生器还包括数量计数监视器（NCM），用于确定在多少个输入信号周期期间数量计数保持恒定，并将恒定周期数（Ncp）与临界数量的恒定周期（Ncp_crit）进行比较。 每当计数监视器（NCM）确定恒定周期数（Ncp）超过临界恒定周期数（Ncp_crit）时，移频器（FSH）将触发振荡器移动主时钟频率。