公开(公告)号：EP3069577A1

公开(公告)日：2016-09-21

申请号：EP14815000.6

申请日：2014-11-14

申请人： Nadir S.r.l.

发明人： PATELLI, Alessandro ,  VERGA FALZACAPPA, Emanuele ,  SCOPECE, Paolo ,  PIEROBON, Roberto ,  VEZZU', Simone

IPC分类号： H05H1/24 ,  H05H1/30

CPC分类号： H05H1/30 ,  H05H1/2406 ,  H05H2001/2462 ,  H05H2245/125

摘要： A method and a device for generating a plasma in atmospheric- pressure, low-temperature conditions are described herein. The device described for the generation of the plasma comprises a first pair of electrodes, each of which separated by a dielectric layer and externally positioned with respect to a tubular duct where the gas flows, and a second pair of electrodes, also in this case each of which separated by a dielectric layer and externally positioned with respect to said tubular duct where the same gas flows downstream with respect to the first pair with respect to the direction of the flow. A high-frequency excitation is applied to the first pair of electrodes while a Radio-Frequency excitation is applied to the second pair of electrodes. The plasma generated in this manner emerges from the gas flow at the outlet of the transport duct. The high-frequency excitation can be applied in pulse trains and the Radio-Frequency generator is substantially activated in said pulse trains for the purpose of limiting the thermal load on the treated substrate. Chemical precursors and reagents can be added to the plasma as vapors or aerosols by means of a central transport duct coaxial with the tubular duct for the gas.