公开(公告)号：EP1706888A2

公开(公告)日：2006-10-04

申请号：EP05704766.4

申请日：2005-01-26

申请人： Nanofactory Instruments AB

发明人： ENOKSSON, Peter ,  NAFARI, Alexandra ,  OLIN, Hakan ,  ALTHOFF, Fredrik ,  DANILOV, Andrey ,  DAHLSTRÖM, Jens

IPC分类号： H01J37/26 ,  B81B3/00 ,  G01L1/00 ,  G01L1/14

CPC分类号： G01Q60/366 ,  G01Q30/02 ,  G01Q80/00 ,  H01J2237/2067 ,  Y10T156/10

摘要： A force sensor (200) and nanoidenation system (300) using such force sensor (200), wherein the force sensor (200) comprise a movable membrane (207) attached to a fixed bulk structure (210) with springs (201, 202, 203, 204) formed between the membrane (207) and bulk structure (210); the springs (201, 202, 203, 204) may be provided two on each side of a rectangular membrane(207) and each in the form of a U-shape with displacing elements (801) formed perpendicular to each open end of each U-shaped spring (800). The force sensor further comprises electrodes (206) for detecting capacitive changes between the movable membrane (207) and the electrodes (206) in order to measure a movement in relation to an applied force. The membrane (207) further comprises a probe holding structure (214) for providing a solution for interchangeable probes (211).