公开(公告)号：EP1186063A1

公开(公告)日：2002-03-13

申请号：EP99923840.5

申请日：1999-05-31

申请人： Nanomotion Ltd.

发明人： RAFAELI, Izhak ,  SHIV, Lior ,  KARASIKOV ,Nir ,  GANOR,Ze ev

IPC分类号： H01L41/09

CPC分类号： H01L41/0913 ,  H01L41/083 ,  H02N2/004 ,  H02N2/0075

摘要： A piezoelectric micromotor for moving a moveable element comprising: a vibrator in the shape of a rectangular parallelepiped formed from a plurality of thin layers of piezoelectric material having first and second identical relatively large rectangular face surfaces defined by long and short edge surfaces wherein the layers are aligned one on top of the other and have their face surfaces bonded together; electrodes on surfaces of the layers; a contact region located on one or more edge surfaces of the layers, urged against the body; and at least one electrical power supply that electrifies electrodes to excite vibrations in the vibrator and thereby in the contact region that impart motion to the body.