X-RAY DIFFRACTION MICROSCOPE AND X-RAY DIFFRACTION MEASUREMENT METHOD USING X-RAY DIFFRACTION MICROSCOPE

    公开(公告)号:EP1672361A1

    公开(公告)日:2006-06-21

    申请号:EP04773156.7

    申请日:2004-09-09

    IPC分类号: G01N23/207 G21K7/00

    CPC分类号: G01N23/207 G01N23/20 G21K7/00

    摘要: An X-ray diffraction microscope apparatus (1) has an X-ray generating apparatus (2), a sample stage (3), a collimator (4) serving to suppress angle divergence, a two-dimensional X-ray detector (5) having an energy resolving power, an image processing apparatus, and an image recording and displaying apparatus (6). An angle divergence of diffracted X-rays is suppressed by moving a sample (7) and the two-dimensional X-ray detector (5) as close as possible via the collimator (4). The diffracted X-rays are measured and imaged in a state in which the two-dimensional X-ray detector (5) and the sample stage (3) are at a standstill without being moved. Accordingly, it is possible to provide an X-ray diffraction microscope apparatus which can acquire an image in an extremely short time, and can image a difference of an inhomogeneous sample, a material in which different crystal structures exist in one sample or a sample in which textures having different directions are contained and an X-ray diffraction measuring method using the X-ray diffraction microscope apparatus.

    摘要翻译: X射线衍射显微镜装置(1)具有X射线产生装置(2),样品台(3),用于抑制角度发散的准直器(4),二维X射线检测器(5) 具有能量分辨能力,图像处理装置和图像记录和显示装置(6)。 通过准直器(4)将样品(7)和二维X射线检测器(5)尽可能靠近移动来抑制衍射X射线的角度发散。 在二维X射线检测器(5)和样品台(3)处于静止状态而不被移动的状态下,测量并成像衍射的X射线。 因此,可以提供能够在极短时间内获取图像的X射线衍射显微镜装置,并且可以对不均匀样品,在一个样品或样品中存在不同晶体结构的材料进行成像 包含具有不同方向的纹理和使用X射线衍射显微镜装置的X射线衍射测量方法。