公开(公告)号：EP2597697A1

公开(公告)日：2013-05-29

申请号：EP11190975.0

申请日：2011-11-28

申请人： Nederlandse Organisatie voor Toegepast -Natuurwetenschappelijk Onderzoek TNO ,  Koninklijke Philips Electronics N.V.

发明人： Verschuren, Coen ,  van Mol, Antonius Maria Bernardus ,  van de Weijer, Peter

IPC分类号： H01L51/52

CPC分类号： H01L51/5259 ,  H01L51/5253 ,  H01L51/56 ,  H01L2251/568

摘要： The invention relates to a sealed thin-film device (10, 12, 14, 15, 16, 17, 18), to a method of repairing a sealing layer (20) applied to a thin-film device (30) to produce the sealed thin-film device, to a system (200) for repairing the sealing layer applied to the thin-film device to generate the sealed thin-film device and to a computer program product. The sealed thin-film device comprises a thin-film device and a sealing layer applied on the thin-film device for protecting the thin-film device from environmental influence. The sealing layer comprising at least a first and a second barrier layer (22, 24) and a getter layer (25) arranged between the first and the second barrier layer. The sealed thin-film device further comprises locally applied mending material (40; 42, 44) for sealing a local breach (50) in an outer one (22) of said barrier layers.
An effect of this sealed thin-film device is that the operational life-time of the sealed thin-film device is improved. Furthermore, the production yield of the production of sealed thin-film devices is improved.

摘要翻译： 本发明涉及一种密封薄膜装置（10,12,14,15,16,17,18），用于修复施加到薄膜装置（30）上的密封层（20）的方法，以产生 密封薄膜器件，用于修复施加到薄膜器件上的密封层以产生密封薄膜器件的系统（200）和计算机程序产品。 密封薄膜器件包括薄膜器件和施加在薄膜器件上的密封层，用于保护薄膜器件免受环境影响。 密封层包括至少第一和第二阻挡层（22,24）和布置在第一和第二阻挡层之间的吸气剂层（25）。 所述密封薄膜装置还包括局部施加的修补材料（40; 42,44），用于密封所述阻挡层的外侧（22）中的局部破裂（50）。 这种密封薄膜器件的作用是提高密封薄膜器件的使用寿命。 此外，提高了密封薄膜器件的生产的产量。