公开(公告)号：EP3599470A1

公开(公告)日：2020-01-29

申请号：EP18185282.3

申请日：2018-07-24

申请人： Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO

发明人： Herfst, Roelof Willem ,  Bijnagte, Anton Adriaan ,  Biemond, Jan Jacobus Benjamin ,  Maturová, Klára

IPC分类号： G01Q40/02 ,  G01Q40/00

摘要： The invention is directed at a method of performing scanning probe microscopy on a substrate surface using a scanning probe microscopy system. A probe tip and substrate surface are moved relative to each other in one or more directions parallel to the scanning plane to position the probe tip to a scanning position on the substrate surface with the probe tip; a displacement is measured by an encoder of said probe tip in said one or more directions; and a fiducial pattern is provided fixed relative to the substrate surface, said fiducial pattern having a scannable structure that is scannable by said probe tip and said structure forming a grid of fiducial marks in said one or more dimensions; said grid dimensioned to allow for measuring placement deviations of the probe tip relative to the probe head by identifying one or more fiducial marks in the fiducial pattern.

公开(公告)号：EP3591410A1

公开(公告)日：2020-01-08

申请号：EP18182254.5

申请日：2018-07-06

申请人： Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO

发明人： Herfst, Roelof Willem ,  Bijnagte, Anton Adriaan ,  Dekker, Albert ,  Biemond, Jan Jacobus Benjamin

IPC分类号： G01Q70/02 ,  G01Q70/10

摘要： The present document relates to a probe chip for use in a scanning probe microscopy device for holding a probe mounted thereon. The probe chip includes a carrier element having a probe bearing side which is configured for bearing the probe to be extending therefrom as an integral or mounted part thereof. The carrier element further comprises a mounting side configured for mounting the probe chip onto a scan head of the scanning probe microscopy device, wherein the mounting side extends in a longitudinal and lateral direction of the carrier element to be substantially flat. The carrier element towards the probe bearing side thereof is truncated in the lateral direction on either side of a longitudinal axis through a center of the carrier element, such as to enable a rotation of the probe chip over a rotation angle around the longitudinal axis in use when the longitudinal axis is inclined at an inclination angle relative to a substrate surface to be scanned and when the probe is in a measurement position relative to the substrate surface.