公开(公告)号：EP3146557A1

公开(公告)日：2017-03-29

申请号：EP15731409.7

申请日：2015-05-20

申请人： Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO

发明人： MAAS, Diederik Jan ,  NIEUWKOOP, Evert ,  VAN ZWET, Erwin John ,  VAN PUTTEN, Michel ,  KOSTER, Norbertus Benedictus

IPC分类号： H01J40/16

CPC分类号： H01J40/16 ,  G03F7/70483

摘要： A radiation sensor device is disclosed for use with a radiation source, capable of emitting radiation with photon energies larger than the work function of the target comprising a target plate to be impacted by the radiation to generate photo-electrons, the target plate being electrically isolated from a shielding electrode. The shielding electrode is arranged to collect energy-filtered photo-electrons from the target plate, using an electrostatic barrier for the filtering. The target plate is constructed of a carbon material. A current measurement device is operative to keep the target plate at a preset voltage difference with respect to the shielding electrode and measure a photo-electron deficit current as a result of radiation impact on the target plate.

摘要翻译： 公开了一种与辐射源一起使用的辐射传感器装置，其能够发射具有大于目标板的目标板的功函数的光子能量，所述目标板被受辐射影响以产生光电子，靶板电隔离 从屏蔽电极。 屏蔽电极布置成使用用于滤波的静电屏障从目标板收集能量过滤的光电子。 靶板由碳材料构成。 电流测量装置用于将靶板保持在相对于屏蔽电极的预设电压差，并且由于辐射对靶板的影响而测量光电子缺陷电流。