-
1.
公开(公告)号:EP3743748A1
公开(公告)日:2020-12-02
申请号:EP19761027.2
申请日:2019-02-28
申请人: Newport Corporation
发明人: SOSNOWSKI, Thomas , PETERSEN, Alan , BOGGY, Richard , THIJSSEN, Christoph , UTTER, Steven , FELDMAN, Mark
IPC分类号: G02B1/11
公开(公告)号:EP3743748A1
公开(公告)日:2020-12-02
申请号:EP19761027.2
申请日:2019-02-28
申请人: Newport Corporation
发明人: SOSNOWSKI, Thomas , PETERSEN, Alan , BOGGY, Richard , THIJSSEN, Christoph , UTTER, Steven , FELDMAN, Mark
IPC分类号: G02B1/11