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公开(公告)号：EP1190759A3
公开(公告)日：2002-12-04
申请号：EP01402414.5
申请日：2001-09-20
CPC分类号： B01D53/22 , B01D53/04 , B01D53/0446 , B01D2258/0216 , B01D2259/402
摘要： There is provided a method and an apparatus for collecting a rare gas, which are capable of effectively collecting the rare gas contained in an exhaust gas exhausted from a rare gas using apparatus such as a plasma apparatus or the like, and moreover capable of securely supplying the rare gas having a predetermined purity to the rare gas using apparatus, and the method for collecting rare gas which comprises collecting a rare gas contained in an exhaust gas exhausted from a rare gas using apparatus operated under decompression, the method comprises the step of collecting the rare gas by separating the rare gas and impurities contained in the exhaust gas via at least two gas separating steps.
摘要翻译： 本发明提供一种稀有气体回收方法及回收装置，能够有效地回收利用等离子体装置等稀有气体排出装置排出的排出气体中所含的稀有气体，并且能够可靠地供给 对所述稀有气体使用装置提供具有预定纯度的稀有气体和稀有气体的收集方法，所述方法包括收集稀有气体中所含的稀有气体的稀有气体的方法，所述稀释气体使用在减压下操作的装置，所述方法包括以下步骤： 该稀有气体通过至少两个气体分离步骤分离废气中所含的稀有气体和杂质。
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2.发明公开
公开(公告)号：EP1190759A2
公开(公告)日：2002-03-27
申请号：EP01402414.5
申请日：2001-09-20
CPC分类号： B01D53/22 , B01D53/04 , B01D53/0446 , B01D2258/0216 , B01D2259/402
摘要： There is provided a method and an apparatus for collecting a rare gas, which are capable of effectively collecting the rare gas contained in an exhaust gas exhausted from a rare gas using apparatus such as a plasma apparatus or the like, and moreover capable of securely supplying the rare gas having a predetermined purity to the rare gas using apparatus, and the method for collecting rare gas which comprises collecting a rare gas contained in an exhaust gas exhausted from a rare gas using apparatus operated under decompression, the method comprises the step of collecting the rare gas by separating the rare gas and impurities contained in the exhaust gas via at least two gas separating steps.
摘要翻译： 提供了一种用于收集稀有气体的方法和装置，其能够使用诸如等离子体装置等的装置有效地收集从稀有气体排出的废气中所含的稀有气体，并且还能够可靠地供应 对于稀有气体使用装置，具有预定纯度的稀有气体，以及收集稀有气体的方法，其特征在于，使用在减压下运转的装置收集从稀有气体排出的废气中所含的稀有气体，所述方法包括： 通过至少两个气体分离步骤分离废气中所含的稀有气体和杂质的稀有气体。
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公开(公告)号：EP1190759B1
公开(公告)日：2005-08-31
申请号：EP01402414.5
申请日：2001-09-20
CPC分类号： B01D53/22 , B01D53/04 , B01D53/0446 , B01D2258/0216 , B01D2259/402
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公开(公告)号：EP1248099A3
公开(公告)日：2002-10-16
申请号：EP02007070.2
申请日：2002-03-27
IPC分类号： G01N21/69
CPC分类号： G01N21/69
摘要： The present invention provides a method and an apparatus for analyzing nitrogen in a gas, in which the concentration of nitrogen can be continuously measured with good sensitivity without wasting a sample gas. At least one wavelength for measuring a concentration of nitrogen according to the intensity of a light generated by discharge, is selected from a group consisting of 215±2nm, 226±2nm, 238±2nm, 242±2nm, 246±1nm, 256±2nm, 260±2nm, 266±2nm, 271±1nm, 276±4nm, 285±2nm, 294±1nm, and 300±2nm.
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公开(公告)号：EP1248099A2
公开(公告)日：2002-10-09
申请号：EP02007070.2
申请日：2002-03-27
IPC分类号： G01N21/69
CPC分类号： G01N21/69
摘要： The present invention provides a method and an apparatus for analyzing nitrogen in a gas, in which the concentration of nitrogen can be continuously measured with good sensitivity without wasting a sample gas.
At least one wavelength for measuring a concentration of nitrogen according to the intensity of a light generated by discharge, is selected from a group consisting of 215±2nm, 226±2nm, 238±2nm, 242±2nm, 246±1nm, 256±2nm, 260±2nm, 266±2nm, 271±1nm, 276±4nm, 285±2nm, 294±1nm, and 300±2nm.摘要翻译： 本发明提供了一种用于分析气体中的氮的方法和装置，其中可以以高灵敏度连续测量氮的浓度而不浪费样品气体。 从由215±2nm，226±2nm，238±2nm，242±2nm，246±1nm，256±2nm组成的组中选择至少一种根据放电产生的光的强度来测量氮浓度的波长。 2nm，260±2nm，266±2nm，271±1nm，276±4nm，285±2nm，294±1nm和300±2nm。
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7.发明授权
公开(公告)号：EP1291638B1
公开(公告)日：2006-07-26
申请号：EP02007655.0
申请日：2002-04-04
发明人： Sato, Tetsuya , Wu, Shang-Qian , Kimijima, Tetsuya
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8.发明公开
公开(公告)号：EP1291638A3
公开(公告)日：2004-03-24
申请号：EP02007655.0
申请日：2002-04-04
发明人： Sato, Tetsuya , Wu, Shang-Qian , Kimijima, Tetsuya
摘要： A method and an apparatus for measuring the concentrations of the components of a fluid are described, which can be used to measure the concentrations of the components continuously in real time and to monitor a high pressure gas, and is suitably used for in-line monitoring. In the method and the apparatus, a fluid sample is conducted through a measuring tube, wherein the measuring tube has a small aperture with a constant diameter in a fluid flow path. The pressure difference (P1-P2) between the upstream and the downstream of the small aperture and the flow rate at the downstream of the small aperture are measured to determine the concentrations of the components of the fluid.
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9.发明公开Method and apparatus for measuring concentrations of components of fluid 有权Vorrichtung und Verfahren zum Messen der Konzentrationen von Fluid-Komponenten
公开(公告)号：EP1291638A2
公开(公告)日：2003-03-12
申请号：EP02007655.0
申请日：2002-04-04
发明人： Sato, Tetsuya , Wu, Shang-Qian , Kimijima, Tetsuya
IPC分类号： G01N7/00
摘要： A method and an apparatus for measuring the concentrations of the components of a fluid are described, which can be used to measure the concentrations of the components continuously in real time and to monitor a high pressure gas, and is suitably used for in-line monitoring. In the method and the apparatus, a fluid sample is conducted through a measuring tube, wherein the measuring tube has a small aperture with a constant diameter in a fluid flow path. The pressure difference (P1-P2) between the upstream and the downstream of the small aperture and the flow rate at the downstream of the small aperture are measured to determine the concentrations of the components of the fluid.
摘要翻译： 描述了一种用于测量流体组分浓度的方法和装置，其可以用于实时连续地测量组分的浓度并监测高压气体，并且适用于在线监测 。 在该方法和装置中，流体样品通过测量管传导，其中测量管具有在流体流动路径中具有恒定直径的小孔径。 测量小孔径上游和下游之间的压力差（P1-P2）和小孔下游的流速，以确定流体组分的浓度。
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