公开(公告)号：EP0723944A1

公开(公告)日：1996-07-31

申请号：EP96300519.4

申请日：1996-01-25

申请人： OPTICAL COATING LABORATORY, INC.

发明人： Yamasaki, Nancy L.S. ,  Wendt, Lauren R. ,  Apfel, Joseph H.

IPC分类号： C03C17/34

CPC分类号： C03C17/3441 ,  C03C17/3435 ,  C03C17/3452 ,  Y10T428/24975 ,  Y10T428/265 ,  Y10T428/30

摘要： The optical properties (absorption, reflection, transmittance, transparency) and physical attributes (hardness, friction, durability, etc.) of metal oxides, nitrides, or films that combine these materials can be modified by adding fluorine to the deposition mixture. The extent of change in properties depends on the amount of fluorine incorporated. Contrary to previous information, the presence of fluorine does not prevent adhesion of overlayers such as hard carbon, hydrogenated carbon, or diamond-like carbon. Considering for example massive silicon oxynitride hardcoat layers (94) which are part of wear resistant composite windows for visible spectral applications, preferably fluorine is incorporated in a relatively very thin surface-adjacent region or layer (94) of the hardcoat on the side thereof on which a carbonaceous layer such as DLC is formed. As a result, the index of refraction of the very thin surface region is reduced, the surface region can be used as an effective interference layer, absorption is reduced, reflectance is reduced, transmittance and transparency are improved, and durability is maintained. These fluorine-modified films can be used in many optical designs, including windows (92) or wear resistant coating for laser scanner windows and ophthalmic applications.

摘要翻译： 组合这些材料的金属氧化物，氮化物或膜的光学性质（吸收，反射，透射率，透明度）和物理属性（硬度，摩擦，耐久性等）可以通过向沉积混合物中加入氟来改变。 性能变化的程度取决于掺入的氟的量。 与之前的信息相反，氟的存在并不能防止诸如硬碳，氢化碳或类金刚石碳等覆盖层的粘附。 考虑到例如作为用于可见光谱应用的耐磨复合窗口的一部分的大量氮氧化硅硬涂层（94），优选地将氟引入在其一​​侧的硬涂层的相对非常薄的表面相邻区域或层（94）中 其中形成碳质层如DLC。 结果，非常薄的表面区域的折射率减小，可以将表面区域用作有效的干涉层，减少吸收，降低反射率，提高透光率和透明性，并且保持耐久性。 这些氟改性膜可以用于许多光学设计，包括窗口（92）或用于激光扫描仪窗口和眼科应用的耐磨涂层。