公开(公告)号：EP2030069A2

公开(公告)日：2009-03-04

申请号：EP07825688.0

申请日：2007-06-20

申请人： ORBOTECH LTD.

发明人： SLOR, Yechiel ,  BRONFMAN, Arkady ,  TZUBERY, Roni ,  ZEMER, Dan

IPC分类号： G02B26/10

CPC分类号： G02B26/101 ,  G02B7/1821 ,  G02B7/198

摘要： A flat surface tilting device including a selectably positionable flat surface element assembly defining a flat surface element having a flat surface and a pivot location portion, the pivot location portion being generally centered with respect to the flat surface, a pivot support element pivotably engaging the pivot location portion, an electromagnet, fixed with respect to the pivot support element and arranged for application of magnetic force in a direction generally perpendicular to the flat surface thereby to pivot the flat surface element about the pivot support element, a sensor for sensing the position of the flat surface element and feedback circuitry operative in response to an output of the sensor to govern operation of the electromagnet.