公开(公告)号：EP1754049A2

公开(公告)日：2007-02-21

申请号：EP04754729.4

申请日：2004-06-08

申请人： Omniprobe, Inc.

发明人： MOORE, Thomas, M. ,  ANTHONY, John, M.

IPC分类号： G01N23/22

CPC分类号： G01N23/2204 ,  G02B21/32 ,  H01J2237/31745

摘要： Disclosed is a method for analyzing the composition of a microscopic particle (100) resting on a first sample surface (110). The method comprises positioning a micro-manipulator probe (120) near the particle; attaching the particle to the probe (120); moving the probe (120) and the attached particle (100) away from the first sample surface (110); positioning the particle on a second sample surface (150); and, analyzing the composition of the particle on the second sample surface (150) by energy-dispersive X-ray analysis or detection of Auger electrons. The second surface (150) has a reduced or non-interfering background signal during analysis relative to the background signal of the first surface (110). Also disclosed are methods for adjusting potentials after its transfer and relocation to the second sample surface (150).