公开(公告)号：EP2352050A4

公开(公告)日：2014-01-29

申请号：EP09827346

申请日：2009-11-18

Applicant: PANASONIC CORP

Inventor： HIRAOKA SOICHIRO ,  TERADA JIROU ,  NAKAZONO SHINSUKE ,  FURUKAWA SHIGEO

IPC: G02B26/08 ,  G02B26/10

CPC classification number: G02B26/0858 ,  G02B26/101

Abstract: An optical reflection element includes a mirror portion and an oscillator coupled to the mirror portion. The oscillator includes a base, an insulating layer, a drive element, and a monitor element. The insulating layer is formed on the base. The drive element and the monitor element are formed on the insulating layer, and are separated from each other by a separation groove. Each of the drive element and the monitor element includes a lower electrode layer, a piezoelectric layer, and an upper electrode layer formed in that order on the insulating layer. The monitor element has high detection accuracy, allowing the optical reflection element to perform self-excited driving with high accuracy.

公开(公告)号：EP1460043A4

公开(公告)日：2011-08-10

申请号：EP02791993

申请日：2002-12-25

Applicant: PANASONIC CORP

Inventor： HIRAKA MASAHIRO ,  FURUKAWA SHIGEO ,  FUJITA MITSUHIRO

IPC: C03B7/094 ,  C03B11/00 ,  C03B19/10

CPC classification number: C03C3/00 ,  C03B19/1045 ,  C03B19/1055 ,  C03B19/109 ,  Y02P40/57

公开(公告)号：EP2407812A4

公开(公告)日：2014-05-21

申请号：EP10766813

申请日：2010-04-16

Applicant: PANASONIC CORP

Inventor： NAKAZONO SHINSUKE ,  HIRAOKA SOICHIRO ,  TERADA JIROU ,  FURUKAWA SHIGEO ,  HORIE TOSHIAKI ,  KOMAKI KAZUKI ,  TADA MASAKI ,  YAMAMOTO YUTA

IPC: G02B26/08

CPC classification number: G02B26/0858