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    Apparatus and method for generating a nearly mono-energetic, high flux beam of high velocity atomic gas particles
    2.
    发明公开
    Apparatus and method for generating a nearly mono-energetic, high flux beam of high velocity atomic gas particles 失效
    装置和用于以高速产生原子粒子的几乎单能，高密度束法。

    公开(公告)号：EP0262012A1

    公开(公告)日：1988-03-30

    申请号：EP87401935.9

    申请日：1987-08-26

    申请人： PHYSICAL SCIENCES, INC.

    发明人： Caledonia, George E. ,  Krech, Robert H. ,  Green, Byron D. ,  Pirri, Anthony N.

    IPC分类号： H05H3/00 ,  H05H1/22

    CPC分类号： H05H1/22 ,  H05H3/00

    摘要： Method and apparatus for generating a nearly mono-energetic beam of atoms at velocities on the order of several km/s (energies of 1-10eV) and for achieving modification of the surface properties of a target (40) by the beam. A gas is forced through a nozzle throat (16) into a previously evacuated expansion nozzle (28) resulting in the acceleration of the gas in a confined flow. Laser radiation is applied to the gas flow wto cause breakdown and dissociation of the gas into an atomic plasma. The plasma is allowed to expand within the nozzle cone (28) reaching a high velocity in the desired range. The beam is generated within a vacuum chamber (12).

    摘要翻译： 在速度几公里/秒（1-10eV的能量）的数量级上产生原子的近单一能量的束以及用于通过光束实现的目标（40）的表面性能的改性方法和装置。 的气体通过喷嘴喉部（16）压入预先抽空的膨胀喷嘴（28）中的气体的在密闭流的加速度得到的。 激光辐射施加于该气体的气体流WTO原因击穿和离解成在原子等离子体。 等离子体被允许在喷嘴圆锥体（28）到达在期望的范围内的高流速内膨胀。 该光束被一个真空室（12）内产生的。