SENSOR
    2.
    发明公开
    SENSOR 有权
    传感器

    公开(公告)号:EP2053413A1

    公开(公告)日:2009-04-29

    申请号:EP07831491.1

    申请日:2007-11-09

    IPC分类号: G01P15/125 G01C19/56 G01P9/04

    摘要: A sensor includes detecting element (28) with an acceleration sensor, which is formed of weight (18) coupled to rigid section (14) via flexible section (16), substrate (10) confronting weight(18), and an electrode section including opposed electrodes (20, 22, 24, 26) placed on respective opposed faces of weight(18) and substrate (10). This structure prevents weight (18) from moving along Z-axis, so that a detection accuracy of acceleration occurring along X-axis or Y-axis can be improved.

    摘要翻译: 传感器包括具有加速度传感器的检测元件(28),所述加速度传感器由通过柔性部分(16),与基座(10)相对的重物(18)耦合到刚性部分(14)的重物(18)和包括 相对的电极(20,22,24,26)放置在重物(18)和基底(10)的相对的相对面上。 这种结构防止重量(18)沿Z轴移动,从而可以提高沿X轴或Y轴发生的加速度的检测精度。