公开(公告)号：EP3734641A1

公开(公告)日：2020-11-04

申请号：EP18897698.9

申请日：2018-12-20

申请人： Photo Electron Soul Inc.

发明人： NISHITANI, Tomohiro ,  KOIZUMI, Atsushi ,  SHIKANO, Haruka

IPC分类号： H01J37/244 ,  G01N23/2251 ,  H01J37/073 ,  H01J37/252

摘要： The present invention addresses the problem of providing a sample inspection device and a sample inspection method, whereby noise is removed from a detection signal, and a generated electron beam is utilized effectively for inspection.
A sample inspection device according to the present invention is provided with a light source for emitting frequency-modulated light, a photocathode for emitting an electron beam in response to receiving the frequency-modulated light, a detector for detecting electrons emitted from a sample irradiated by the electron beam and generating a detection signal, and a signal extractor for extracting a signal having a frequency corresponding to a modulation frequency of the frequency-modulated light from within the detection signal.

公开(公告)号：EP3780063A1

公开(公告)日：2021-02-17

申请号：EP20781301.5

申请日：2020-05-08

申请人： Photo Electron Soul Inc.

发明人： KOIZUMI, Atsushi ,  IIJIMA, Hokuto

IPC分类号： H01J37/073

摘要： The present disclosure addresses the problem of providing an electron gun that can directly monitor an intensity of an electron beam emitted from a photocathode using only the configuration provided to the electron gun, an electron beam applicator equipped with an electron gun, and a method for controlling an electron gun.
The aforementioned problem can be solved by
an electron gun comprising
a light source,
a photocathode that emits an electron beam in response to receiving light from the light source,
an anode,
an electron-beam-shielding member with which it is possible to shield part of the electron beam, and
a measurement unit that measures the intensity of the electron beam emitted from the photocathode using a measurement electron beam shielded by the electron-beam-shielding member.

公开(公告)号：EP3608939A1

公开(公告)日：2020-02-12

申请号：EP18781434.8

申请日：2018-03-30

申请人： Photo Electron Soul Inc.

发明人： NISHITANI, Tomohiro ,  KOIZUMI, Atsushi ,  KAWAMATA, Tomoaki ,  SHIKANO, Haruka

IPC分类号： H01J37/073

摘要： The present invention addresses the problem of providing an electron beam generator and an electron beam applicator for which maintenance is facilitated.
The electron beam generator comprises a vacuum chamber, a photocathode holder, an activation vessel, and an internal motive power transmission member. The photocathode holder is capable of moving relative to the activation vessel.