INTEGRATED WAVEFRONT SENSOR AND PROFILOMETER
    2.
    发明公开
    INTEGRATED WAVEFRONT SENSOR AND PROFILOMETER 有权
    集成传感器轴前与轮廓

    公开(公告)号:EP2926082A4

    公开(公告)日:2016-08-17

    申请号:EP13858732

    申请日:2013-11-22

    IPC分类号: G01B11/24 G01M11/02

    摘要: An instrument for measuring aspheric optical surfaces includes both an optical wavefront sensor and a single-point optical profilometer. The optical wavefront sensor measures surface height variations throughout one or more areas of an aspheric test surface. The single-point profilometer measures surface height variations along one or more traces on the aspheric test surface. At least one of the traces intersects at least one of the areas, and respective spatial frames of reference for the traces and areas are relatively adapted to each other by minimizing differences between points of nominal coincidence between the areas and traces.