公开(公告)号：EP4246106A3

公开(公告)日：2023-12-20

申请号：EP23158244.6

申请日：2023-02-23

申请人： Qorvo US, Inc.

发明人： TSAI, Julius Minglin ,  BENJAMIN, Daniel Krstyen ,  CHEN, Yenhao ,  KWA, Tom A.

IPC分类号： G01H11/06 ,  G06V40/13

摘要： A hybrid sensor (100) includes a piezoresistive element (126) for sensing an applied force, a piezoelectric micromachined ultrasonic transducer (PMUT) (102) for sensing the presence of an object within a threshold distance of the hybrid sensor, and a substrate (156) onto which both the piezoresistive element and the PMUT are disposed.

公开(公告)号：EP4246106A2

公开(公告)日：2023-09-20

申请号：EP23158244.6

申请日：2023-02-23

申请人： Qorvo US, Inc.

发明人： TSAI, Julius Minglin ,  BENJAMIN, Daniel Krstyen ,  CHEN, Yenhao ,  KWA, Tom A.

IPC分类号： G01H11/06 ,  G06V40/13

摘要： A hybrid sensor (100) includes a piezoresistive element (126) for sensing an applied force, a piezoelectric micromachined ultrasonic transducer (PMUT) (102) for sensing the presence of an object within a threshold distance of the hybrid sensor, and a substrate (156) onto which both the piezoresistive element and the PMUT are disposed.