公开(公告)号：EP1486673A4

公开(公告)日：2006-01-25

申请号：EP03712801

申请日：2003-03-20

申请人： RICOH KK

发明人： YAMAMOTO HIDEMI ,  TSUJI KOHJI

IPC分类号： F04D19/04 ,  F04B37/14 ,  F04B37/16 ,  F04B49/00 ,  F04B49/06 ,  F04B49/10 ,  F04B49/20 ,  F04D27/00

CPC分类号： F04B49/20 ,  F04B37/14 ,  F04B49/00 ,  F04B2203/0204 ,  F04B2205/01 ,  F04D19/04 ,  F04D27/02

摘要： A vacuum pump control device capable of suppressing a power consumption by a vacuum pump by varying the speed of the vacuum pump according to the operating conditions of a vacuum device, wherein a condition set part (4) sets a relation between the operating conditions of the vacuum device (10) and the rotational speed of the vacuum pump (2) for vacuating the vacuum device (10) to a proper value so that the rotational speed of the vacuum pump (2) does not reach a rotational speed more than that required, a control part (6) inputs external signals such as S1 to Sn in correspondence with the operating conditions of the vacuum device (10), reads the rotating speed of the vacuum pump (2) in correspondence with the external signals from the condition set part (4), and outputs the rotational speed, and an inverter (8) controls the rotational speed of the vacuum pump based on the output from the control part (6).

摘要翻译： 本发明的目的是通过根据真空装置的操作状态改变真空泵的转数来控制真空泵的功率消耗。 条件设定部4设定真空装置10的动作状态与抽真空装置10的真空泵2的旋转速度的关系。将该关系设定为适当的值，以防止 真空泵2的转速变得比所需要的转速更高。 输入与真空装置10的运转状态对应的外部信号S1〜Sn的控制部6从条件设定部4读出，输出与外部信号对应的真空泵2的旋转速度。 逆变器8基于控制部6的输出来控制真空泵的旋转速度