PARTICLE MEASUREMENT DEVICE AND PARTICLE MEASUREMENT METHOD

    公开(公告)号:EP4123289A1

    公开(公告)日:2023-01-25

    申请号:EP21770643.1

    申请日:2021-03-03

    申请人: RION Co., Ltd.

    IPC分类号: G01N15/02 G01N21/05 G01N21/49

    摘要: In the present invention, irradiation light is radiated to a flow channel, and scattered light from particles included in a material passing through a detection region formed in a predetermined section is condensed at a position virtually extended in the flow direction of a sample and imaged at a predetermined frame rate. An amount of movement in the direction perpendicular to the flow direction of the particles due to Brownian motion is then calculated on the basis of a plurality of frame images. In order to correct an error in the amount of movement on an image, caused by magnification in a defocus position, the amount of movement is corrected using a correction value determined in advance, and the diameter of the particles is specified.

    PARTICLE MEASUREMENT DEVICE
    2.
    发明公开

    公开(公告)号:EP4083604A1

    公开(公告)日:2022-11-02

    申请号:EP20906454.2

    申请日:2020-12-17

    申请人: RION Co., Ltd.

    IPC分类号: G01N15/02 G01N21/05

    摘要: Provided is a particle measurement device in which irradiation light emitted by a light source is expanded by an expander in a shape satisfying the requirements of a diffractive optical element, converted into parallel light, and made to enter the diffractive optical element. The diffractive optical element shapes the irradiation light entering therein into a flat top beam in which the cross section in the focal position thereof has an elongate rectangle shape. The intensity distribution of light can be made substantially uniform in a detection area formed by the shaped irradiation light.