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公开(公告)号:EP1468248A1
公开(公告)日:2004-10-20
申请号:EP02774412.7
申请日:2002-09-25
申请人: ROBERT BOSCH GMBH
发明人: WILLIG, Rainer , FRANZ, Jochen , KUHLMANN, Burkhard , HAUER, Joerg , GOMEZ, Udo-Martin , MAURER, Dieter , DOERING, Christian , BAUER, Wolfram , BISCHOF, Udo , NEUL, Reinhard , CLASSEN, Johannes , LANG, Christoph , FREY, Jens
CPC分类号: G01C19/5747
摘要: The invention relates to a rotational rate sensor comprising a substrate and a Coriolis element (2a, 2b), said Coriolis element (2a, 2b) being arranged over a surface of a substrate. According to the invention, stimulation means (12a, 13a, 12b, 13b) are provided for stimulating the Coriolis element (2a, 2b) in such a way that it oscillates parallel to a first axis (X); detection means (15a, 16a, 15b, 16b, 17) are provided for detecting a deviation of the Coriolis element (2a, 2b), caused by a Coriolis force in a second axis (Y) which is perpendicular to the first axis; the first and second axes (X, Y) are parallel to the surface of the substrate; sensor elements (1a, 1b, 2a, 2b, 3a, 3b) are provided which are at least partially mobile in relation to the substrate; and force-mediating means (19, 20) are provided for mediating a static force between the substrate and at least one of the sensor elements (1a, 1b, 2a, 2b, 3a, 3b).
摘要翻译: 本发明涉及一种旋转速率传感器,其包括衬底和科里奥利元件(2a,2b),所述科里奥利元件(2a,2b)布置在衬底的表面上。 根据本发明,(12A,13A,12B,13B)被提供用于刺激科里奥利元件刺激装置(2a,2b)的,它平行于振荡的第一轴线(X)这样的方式; 提供了用于检测科里奥利元件的偏差检测装置(15A,16A,15B,16B,17)(2A,2B),所引起的第二轴(Y)垂直于所述第一轴线的科里奥利力; 第一和第二轴线(X,Y)平行于基板的表面; 提供传感器元件(1a,1b,2a,2b,3a,3b),所述传感器元件相对于所述衬底至少部分可移动; 和力介导装置(19,20),用于调节衬底和传感器元件(1a,1b,2a,2b,3a,3b)中的至少一个之间的静态力。
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公开(公告)号:EP1478902A1
公开(公告)日:2004-11-24
申请号:EP02774413.5
申请日:2002-09-25
申请人: ROBERT BOSCH GMBH
发明人: WILLIG, Rainer , FRANZ, Jochen , KUHLMANN, Burkhard , HAUER, Joerg , GOMEZ, Udo-Martin , MAURER, Dieter , DOERING, Christian , BAUER, Wolfram , BISCHOF, Udo , NEUL, Reinhard , CLASSEN, Johannes , LANG, Christoph , FREY, Jens
CPC分类号: G01C19/5747
摘要: The invention relates to a rotational rate sensor comprising a substrate and a Coriolis element (2a, 2b), said Coriolis element (2a, 2b) being arranged over a surface of a substrate. According to the invention, the Coriolis element (2a, 2b) can be stimulated in such a way that it oscillates parallel to a first axis (X); a deviation of the Coriolis element (2a, 2b), caused by a Coriolis force in a second axis (Y) which is essentially perpendicular to the first axis (X), can be detected; and the first and second axes (X, Y) are parallel to the surface of the substrate. The inventive rotational rate sensor is characterised in that force-mediating means (19, 20) are provided for mediating the action of a force between the substrate and the Coriolis element (2a, 2b).
摘要翻译: 本发明涉及一种旋转速率传感器,其包括衬底和科里奥利元件(2a,2b),所述科里奥利元件(2a,2b)布置在衬底的表面上。 根据本发明,科里奥利元件(2a,2b)可以以平行于第一轴(X)振荡的方式受到刺激; 可以检测由科里奥利力在基本上垂直于第一轴(X)的第二轴(Y)中引起的科里奥利元件(2a,2b)的偏差; 并且第一和第二轴线(X,Y)平行于基板的表面。 本发明的旋转速率传感器的特征在于,提供力介导装置(19,20)用于调节衬底与科里奥利元件(2a,2b)之间的力的作用。
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公开(公告)号:EP1535027A1
公开(公告)日:2005-06-01
申请号:EP03709652.6
申请日:2003-02-25
申请人: ROBERT BOSCH GMBH
发明人: MAURER, Dieter , HAUER, Joerg
CPC分类号: G01C19/5712
摘要: Disclosed is a rotation speed sensor comprising a substrate (100) and a rotating mass (10). A spiral spring device (301-308) has a curvature (331) in the anchoring area thereof.
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公开(公告)号:EP1763658A1
公开(公告)日:2007-03-21
申请号:EP05738156.8
申请日:2005-05-11
申请人: ROBERT BOSCH GMBH
发明人: FRANZ, Jochen , REICHENBACH, Frank , MAURER, Dieter , HOEFER, Holger , SCHWEIKER, Markus-Alexander
CPC分类号: G01J5/0014 , G01J5/02 , G01J5/0225 , G01J5/024 , G01J5/045 , G01J5/06 , G01J5/08 , G01J5/0803 , G01J5/0831 , G01J5/0875 , G01J5/12 , G01N21/3504 , G01N2021/3137 , G01N2021/317
摘要: The invention relates to an infra-red sensor comprising at least one measuring structure (11) consisting of e.g. a sensor chip (10) with a measuring structure (11) and a cap chip (20), which is fixed onto the sensor chip (10) and together with the latter (10) defines a sensor chamber (23). An aperture (25, 32), comprising an inner aperture region (25b, 32b) and an outer aperture region (25a, 32a) that surrounds the latter (25b, 32b), is configured on the upper face (24) of the cap chip (20). The inner aperture region (25b, 32b) is configured above the measuring structure (11) and is transparent to the infra-red radiation (IR 1) that is to be detected and the outer aperture region (25a, 32a) is at least partially intransparent to incident infra-red radiation (IR2). The outer aperture region can be configured in particular as a reflective coating consisting of metal or a dielectric layer, or as a reflective structure composed of trenches with oblique surfaces or an absorbent structure.
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公开(公告)号:EP1478902B1
公开(公告)日:2017-05-24
申请号:EP02774413.5
申请日:2002-09-25
申请人: ROBERT BOSCH GMBH
发明人: WILLIG, Rainer , FRANZ, Jochen , KUHLMANN, Burkhard , HAUER, Joerg , GOMEZ, Udo-Martin , MAURER, Dieter , DOERING, Christian , BAUER, Wolfram , BISCHOF, Udo , NEUL, Reinhard , CLASSEN, Johannes , LANG, Christoph , FREY, Jens
IPC分类号: G01C19/5747
CPC分类号: G01C19/5747
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公开(公告)号:EP1535027B1
公开(公告)日:2015-12-09
申请号:EP03709652.6
申请日:2003-02-25
申请人: ROBERT BOSCH GMBH
发明人: MAURER, Dieter , HAUER, Joerg
IPC分类号: G01C19/56 , G01C19/5712
CPC分类号: G01C19/5712
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