DREHRATENSENSOR
    1.
    发明公开
    DREHRATENSENSOR 审中-公开

    公开(公告)号:EP1468248A1

    公开(公告)日:2004-10-20

    申请号:EP02774412.7

    申请日:2002-09-25

    申请人: ROBERT BOSCH GMBH

    IPC分类号: G01C19/56 G01P3/14

    CPC分类号: G01C19/5747

    摘要: The invention relates to a rotational rate sensor comprising a substrate and a Coriolis element (2a, 2b), said Coriolis element (2a, 2b) being arranged over a surface of a substrate. According to the invention, stimulation means (12a, 13a, 12b, 13b) are provided for stimulating the Coriolis element (2a, 2b) in such a way that it oscillates parallel to a first axis (X); detection means (15a, 16a, 15b, 16b, 17) are provided for detecting a deviation of the Coriolis element (2a, 2b), caused by a Coriolis force in a second axis (Y) which is perpendicular to the first axis; the first and second axes (X, Y) are parallel to the surface of the substrate; sensor elements (1a, 1b, 2a, 2b, 3a, 3b) are provided which are at least partially mobile in relation to the substrate; and force-mediating means (19, 20) are provided for mediating a static force between the substrate and at least one of the sensor elements (1a, 1b, 2a, 2b, 3a, 3b).

    摘要翻译: 本发明涉及一种旋转速率传感器,其包括衬底和科里奥利元件(2a,2b),所述科里奥利元件(2a,2b)布置在衬底的表面上。 根据本发明,(12A,13A,12B,13B)被提供用于刺激科里奥利元件刺激装置(2a,2b)的,它平行于振荡的第一轴线(X)这样的方式; 提供了用于检测科里奥利元件的偏差检测装置(15A,16A,15B,16B,17)(2A,2B),所引起的第二轴(Y)垂直于所述第一轴线的科里奥利力; 第一和第二轴线(X,Y)平行于基板的表面; 提供传感器元件(1a,1b,2a,2b,3a,3b),所述传感器元件相对于所述衬底至少部分可移动; 和力介导装置(19,20),用于调节衬底和传感器元件(1a,1b,2a,2b,3a,3b)中的至少一个之间的静态力。

    DREHRATENSENSOR
    2.
    发明公开

    公开(公告)号:EP1478902A1

    公开(公告)日:2004-11-24

    申请号:EP02774413.5

    申请日:2002-09-25

    申请人: ROBERT BOSCH GMBH

    IPC分类号: G01C19/56 G01P3/14

    CPC分类号: G01C19/5747

    摘要: The invention relates to a rotational rate sensor comprising a substrate and a Coriolis element (2a, 2b), said Coriolis element (2a, 2b) being arranged over a surface of a substrate. According to the invention, the Coriolis element (2a, 2b) can be stimulated in such a way that it oscillates parallel to a first axis (X); a deviation of the Coriolis element (2a, 2b), caused by a Coriolis force in a second axis (Y) which is essentially perpendicular to the first axis (X), can be detected; and the first and second axes (X, Y) are parallel to the surface of the substrate. The inventive rotational rate sensor is characterised in that force-mediating means (19, 20) are provided for mediating the action of a force between the substrate and the Coriolis element (2a, 2b).

    摘要翻译: 本发明涉及一种旋转速率传感器,其包括衬底和科里奥利元件(2a,2b),所述科里奥利元件(2a,2b)布置在衬底的表面上。 根据本发明,科里奥利元件(2a,2b)可以以平行于第一轴(X)振荡的方式受到刺激; 可以检测由科里奥利力在基本上垂直于第一轴(X)的第二轴(Y)中引起的科里奥利元件(2a,2b)的偏差; 并且第一和第二轴线(X,Y)平行于基板的表面。 本发明的旋转速率传感器的特征在于,提供力介导装置(19,20)用于调节衬底与科里奥利元件(2a,2b)之间的力的作用。

    DREHRATENSENSOR
    3.
    发明公开
    DREHRATENSENSOR 有权
    旋转速率传感器

    公开(公告)号:EP1535027A1

    公开(公告)日:2005-06-01

    申请号:EP03709652.6

    申请日:2003-02-25

    申请人: ROBERT BOSCH GMBH

    IPC分类号: G01C19/56 G01P9/04

    CPC分类号: G01C19/5712

    摘要: Disclosed is a rotation speed sensor comprising a substrate (100) and a rotating mass (10). A spiral spring device (301-308) has a curvature (331) in the anchoring area thereof.