公开(公告)号：EP1978395A3

公开(公告)日：2009-03-18

申请号：EP08006872.9

申请日：2008-04-04

Applicant: ROSEMOUNT AEROSPACE INC.

Inventor： Nesnidal, Michael Paul

IPC: G02B5/18 ,  G02B26/08 ,  G02B27/44 ,  G02B27/00

CPC classification number: G02B26/0808 ,  G02B5/1857 ,  G02B5/1871 ,  G02B27/0087 ,  G02B27/4277

Abstract: A method of fabricating a membrane structure for a diffractive phased array assembly is provided. The method includes the steps of providing a wafer having a body and at least a membrane layer and a backside layer disposed on opposite faces of the body, forming a grating pattern on a surface of the membrane layer, and forming a window through the wafer to expose a back surface of the membrane, thereby allowing light to pass through the membrane.

公开(公告)号：EP1978395A2

公开(公告)日：2008-10-08

申请号：EP08006872.9

申请日：2008-04-04

Applicant: ROSEMOUNT AEROSPACE INC.

Inventor： Nesnidal, Michael Paul

IPC: G02B27/00 ,  G02B5/18

CPC classification number: G02B26/0808 ,  G02B5/1857 ,  G02B5/1871 ,  G02B27/0087 ,  G02B27/4277

Abstract: A method of fabricating a membrane structure for a diffractive phased array assembly is provided. The method includes the steps of providing a wafer having a body and at least a membrane layer and a backside layer disposed on opposite faces of the body, forming a grating pattern on a surface of the membrane layer, and forming a window through the wafer to expose a back surface of the membrane, thereby allowing light to pass through the membrane.

Abstract translation: 提供了一种制造衍射相控阵组件的膜结构的方法。 该方法包括以下步骤：提供晶片，其具有主体和至少膜层和设置在主体的相对面上的背侧层，在膜层的表面上形成光栅图案，并且通过晶片形成窗口， 暴露膜的后表面，从而允许光通过膜。