公开(公告)号：EP2435786A1

公开(公告)日：2012-04-04

申请号：EP10702076.0

申请日：2010-01-20

申请人： Robert Bosch GmbH

发明人： LIEBING, Stefan ,  SCHUBERT, Dietrich ,  FUERST, Wolfgang ,  RURLAENDER, Stefan

IPC分类号： G01C19/56 ,  G01P15/125

CPC分类号： G01P15/125 ,  G01P2015/0814

摘要： What is proposed is a micromechanical structure, more particularly an acceleration sensor, comprising a substrate, a seismic mass that is movable relative to the substrate, and at least one anchoring element that is fixedly connected to the substrate, wherein the seismic mass is fixed to the substrate by means of the anchoring element, and wherein at least one spring element is arranged between the seismic mass and the anchoring element, and wherein, furthermore, the anchoring element has at least one stop element for interaction with at least one counter-stop element of the seismic mass.