公开(公告)号：EP2537067A2

公开(公告)日：2012-12-26

申请号：EP11707361.9

申请日：2011-02-14

申请人： Süss Microtec Lithography GmbH

发明人： HANSEN, Sven ,  CONRADI, Matthias ,  FINK, Georg

IPC分类号： G03F7/00

CPC分类号： G03F7/0002 ,  B29C43/58 ,  B29C2043/025 ,  B29C2043/5858 ,  B82Y10/00 ,  B82Y40/00

摘要： The invention relates a method and device for expanding the travel of linear actuators that is available during an embossing stroke. The wedge error compensating head (2) comprises a movable part (4), a stationary part (3) and at least three linear actuators (8). Each linear actuator (8) is connected to one of the two parts (3, 4) at one end and to the other of the two parts (4, 3) by wedges (9) at the other end. By means of the wedges (9), it is possible to roughly compensate for wedge errors and possible tolerances of individual subcomponents of the system. The linear actuators (8) are only used for precision compensation for the wedge error. In this way, sufficient travel is available for the embossing stroke with the linear actuators.