Process for manufacturing DC superconducting quantum interference device
    5.
    发明公开
    Process for manufacturing DC superconducting quantum interference device 失效
    Verfahren zum Herstellen eines gleichstrom鱿鱼。

    公开(公告)号:EP0501220A2

    公开(公告)日:1992-09-02

    申请号:EP92102267.9

    申请日:1992-02-11

    IPC分类号: H01L39/22 H01L39/24

    摘要: To reduce the number of steps of manufacturing a DC superconducting quantum interference device (as will be shortly referred to as "DC-SQUID"), which is to be applied to a highly sensitive electromagnetic sensor, an ammeter, a displacement meter a high-frequency signal amplifier or the like, thereby to improve the production yield. At the time of manufacturing the DC-SQUID, the number of masks is reduced to reduce the number of total steps by simultaneously performing the steps of fabricating an input coil 3 and a feedback coil 2 and the step of fabricating an counter electrode 13 of the components including a pick-up coil 1, the feedback coil 2, the input coil 3, a Josephson junction 10, a washer coil 11 and the counter electrode.

    摘要翻译: 为了减少制造应用于高灵敏度电磁传感器的直流超导量子干涉装置(将被称为“DC-SQUID”)的步骤数量,电流表,位移计, 频率信号放大器等,从而提高产量。 在制造DC-SQUID时,通过同时执行制造输入线圈3和反馈线圈2的步骤,减少掩模的数量以减少总步数,以及制造相对电极13的步骤 包括拾波线圈1,反馈线圈2,输入线圈3,约瑟夫逊结10,清洗线圈11和对电极的部件。