公开(公告)号：EP1635988A4

公开(公告)日：2008-05-07

申请号：EP04776297

申请日：2004-06-04

申请人： SEMITOOL INC ,  WOODRUFF DANIEL J ,  DAVIS JEFFRY ALAN

发明人： WOODRUFF DANIEL J ,  DAVIS JEFFRY ALAN ,  MATTSON DAVID P ,  EGLOFF MATHEW C ,  ERICKSON JAMES J

IPC分类号： C23F1/00 ,  B24B20060101 ,  C12N15/31 ,  C25B9/00 ,  H01L21/00 ,  H01L21/306

CPC分类号： H01L21/6719

摘要： An integrated tool and automatic calibration systems that enable wet chemical processing chambers, lift-rotate units and other hardware to be quickly interchanged without having to recalibrate the transport system or other components to the replacement items. These tools are expected to reduce the down time associated with repairing or maintaining processing chambers and/or lift-rotate units so that the tools can maintain a high throughput. Several aspects of these tools are particularly useful for applications that have stringent performance requirements because components are more likely to require maintenance more frequently, and reducing the down time associated with maintaining such components will significantly enhance the integrated tool.

公开(公告)号：EP1638732A4

公开(公告)日：2007-06-06

申请号：EP04754300

申请日：2004-06-03

申请人： SEMITOOL INC

发明人： MCHUGH PAUL R ,  WILSON GREGORY J ,  WOODRUFF DANIEL J ,  ZIMMERMAN NOLAN ,  ERICKSON JAMES J

IPC分类号： B24B1/00 ,  B24B20060101 ,  B65G49/07 ,  C12N15/31 ,  C25D7/12 ,  C25D17/00 ,  H01L21/00

CPC分类号： C25D7/12 ,  C25D5/08 ,  C25D17/00 ,  C25D17/001 ,  C25D17/007 ,  C25D17/008 ,  C25D21/10 ,  H01L21/6719

摘要： Tools having mounting modules with registration systems are disclosed. The mounting includes positioning elements for precisely locating a reactor and a workpiece transport that moves workpieces to and for the reactor. The relative positions between positioning elements of the reactor are fixed so that the workpiece transport does not need to be recalibrated when the reactor is removed and replaced with another reactor. The reactor includes an agitator for agitating processing fluid at a process surface of the workpiece. The agitator, the reactor, and electrodes within the reactor are configured to reduce the likelihood for electrical shadowing created by the agitator at the surface of the workpiece, and to account for three-dimensional effects on the electrical field as the agitator and/or the workpiece reciprocate relative to each other.