公开(公告)号：EP4075925A1

公开(公告)日：2022-10-19

申请号：EP20898973.1

申请日：2020-12-08

申请人： SHISHIDO ELECTROSTATIC, LTD. ,  NATIONAL UNIVERSITY CORPORATION, IWATE UNIVERSITY

发明人： TAKAHASHI, Katsuyuki ,  KIM, Chyon Hae ,  TAKAKI, Koichi ,  KUBO, Katsuya ,  KANETA, Yuki ,  YAMAGUCHI, Shinichi ,  HIYOSHI, Isao ,  TAKEUCHI, Ryuichi ,  NAGATA, Hidemi

IPC分类号： H05F3/04

摘要： There is provided a charged particle emission device that can cause a charged object to quickly approach a target charged state. There is provided a charged particle emission device comprising a pre-emission state detection unit configured to detect a pre-emission charged state which is a charged state of a charged object before the charged particles are emitted, a learned model configured to receive a charged state of a charged object and a control parameter related to a control amount used for control of the charged particles to be emitted to the charged object to generate an estimated charged state which is a charged state of the charged object after the charged particles are controlled under the control parameter and emitted, an estimated charged state generation unit configured to input the pre-emission charged state and a plurality of control parameters to the learned model to generate a plurality of estimated charged states corresponding to the pre-emission charged state and the plurality of control parameters, a selection unit configured to select an estimated charged state closest to a target charged state from the plurality of estimated charged states, and an emission unit configured to control the charged particles based on the control parameters corresponding to the selected estimated charged state to emit the charged particles to the charged object.

公开(公告)号：EP4075924A1

公开(公告)日：2022-10-19

申请号：EP20899062.2

申请日：2020-12-08

申请人： SHISHIDO ELECTROSTATIC, LTD. ,  NATIONAL UNIVERSITY CORPORATION, IWATE UNIVERSITY

发明人： TAKAHASHI, Katsuyuki ,  KIM, Chyon Hae ,  TAKAKI, Koichi ,  KUBO, Katsuya ,  KANETA, Yuki ,  YAMAGUCHI, Shinichi ,  HIYOSHI, Isao ,  TAKEUCHI, Ryuichi ,  NAGATA, Hidemi

IPC分类号： H05F3/00 ,  H05F3/04

摘要： There is provided a charged particle emission device that can quickly respond to a change in a charged object or environment even during the operation of the device and can adaptively emit charged particles. There is provided a charged particle emission device that includes a pre-emission state detection unit configured to detect a pre-emission charged state which is a charged state of the charged object before charged particles are emitted, an emission time generation unit configured to generate an emission time based on a past emission time of charged particles and a charged state of the charged object after the emission, an emission unit configured to emit charged particles to the charged object which is in the pre-emission charged state based on the generated emission time, a post-emission state detection unit configured to detect a post-emission charged state which is a charged state of the charged object after the charged particles are emitted, a machine learning unit configured to cause a machine learning model to learn a correspondence among the pre-emission charged state, the post-emission charged state, and the emission time generated by the emission time generation unit, and a completion determination unit configured to repeatedly operate the pre-emission state detection unit, the emission time generation unit, the emission unit, the post-emission state detection unit, and the learning unit until the machine learning model satisfies a learning completion condition.