公开(公告)号：EP3311155A1

公开(公告)日：2018-04-25

申请号：EP16811117.7

申请日：2016-06-15

申请人： SOCPRA - Sciences et Génie s.e.c.

发明人： SYLVESTRE, Julien ,  BELAND, Remy

IPC分类号： G01N29/26 ,  G01S15/89 ,  G01N29/28

CPC分类号： G01N29/28 ,  G01N29/0681 ,  G01N29/221 ,  G01N29/223 ,  G01S15/8943 ,  G10K11/02 ,  G10K11/357

摘要： An acoustic microscope for scanning a sample, comprising: a pulse transmitter for generating and propagating first acoustic pulses along a propagation direction; a rotatable mirror for deflecting the first acoustic pulses, the rotatable mirror being rotatable about a rotation axis being substantially orthogonal to the propagation direction; an acoustic lens for focusing the deflected first acoustic pulses in the sample and propagating second acoustic pulses reflected by the sample towards the rotatable mirror, the second acoustic pulses being deflected by the rotatable mirror; a pulse detector for detecting the deflected second acoustic pulses; a transmitter controller for controlling the pulse emitter and emitting each one of the first acoustic pulses as a function of a respective angular position of the rotatable mirror; and a mirror controller for rotating the rotatable mirror in order to scan the sample along a scan direction.