摘要:
A method for producing a crystal of a fluoride wherein a single crystal of a fluoride is produced by pulling down the single crystal from a crucible for holding a melt of a raw material for the crystal having a hole in the bottom portion thereof, characterized in that the plane at the exit portion of the above hole has a desired shape of a plane. A crystal of a fluoride having a shape according to the use of the fluoride can be grown by using carbon, platinum or iridium being a material capable of corresponding to a fluoride and designing the shape of a crucible taking the wettability of the fluoride with each of the materials into consideration. The above method can be employed for producing a crystal of a fluoride having an arbitrary shape.
摘要:
A fine treatment agent for fine treatment of a film stack including a tungsten film and a silicon oxide film is characterized in that it includes at least one from among hydrogen fluoride, nitric acid, ammonium fluoride and ammonium chloride. Thus, the fine treatment agent for performing fine treatment to the film stack of the tungsten film and the silicon oxide film by controlling an etch rate, and a fine treatment method using such fine treatment agent are provided.
摘要:
A chitin oligomer composition and/or chitosan oligomer composition in which the content of oligomers having a degree of polymerization of 3 to 10 is 60% or higher; and a process for producing the oligomer composition(s). The process comprises mixing hydrofluoric acid, another hydrohalogenic acid, or an acid of either with a chitin-based and/or chitosan-based material.
摘要:
Disclosed is a process liquid which causes only little dissolution of atoms from a semiconductor surface and enables to form a clean and flat semiconductor surface. Also disclosed are a processing method and an apparatus for manufacturing a semiconductor. Specifically disclosed is a process liquid which causes only little dissolution of atoms from a semiconductor surface by using an aqueous solution containing at least one alcohol or ketone, thereby realizing a clean and flat surface.
摘要:
A method for preparing tantalum oxide and/or niobium oxide, characterized in that it comprises adding a basic aqueous solution to an aqueous solution of tantalum fluoride salt and/or niobium fluoride salt, to form tantalum hydroxide and/or niobium hydroxide, and then firing said tantalum hydroxide and/or niobium hydroxide. The above method allows the preparation of the tantalum oxide and/or niobium oxide in the state of a needle crystal or columnar crystal, not of a spherical crystal or an assemblage form.