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公开(公告)号：EP0926508A3
公开(公告)日：2001-03-21
申请号：EP98122155.9
申请日：1998-11-25
IPC分类号： G01R33/035 , H01L39/22
CPC分类号： H01L39/2496 , G01R33/0358 , Y10S505/702 , Y10S505/846
摘要： This magnetic sensor comprises a flux transformer 2 having a superconducting thin film 2f formed on a sapphire substrate 2s, and a SQUID 1 disposed on the flux transformer 2 opposite thereto. In this magnetic sensor, since the sapphire substrate 2s, which can be obtained in a large size, is used for the flux transformer 2, even when the SQUID 1 is made smaller, the magnetic flux introduced from the flux transformer 2 into the SQUID 1 can be enhanced so as to increase the effective magnetic flux capturing area, whereby the detecting performance is improved, while the manufacturing cost can be reduced due to the smaller size of the SQUID 1.
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公开(公告)号：EP1043597A2
公开(公告)日：2000-10-11
申请号：EP00400960.1
申请日：2000-04-07
IPC分类号： G01R33/035
CPC分类号： G01R33/0356 , Y10S505/846
摘要： A SQUID bias current adjustment device (AC SUPPLY) supplies a sinusoidal current at 40 kHz, for example, to a coil (12) to generate magnetic field at a SQUID (10). The amplitude of the field corresponds to a half period of a field-voltage characteristic. Voltage generated from the SQUID at this time is filtered by using a filter (14) to pick out components of 40 kHz and 80 kHz. The picked out signal components are rectified and converted to direct current, and the bias current is adjusted such that the maximum value is obtained. In this way, a SQUID bias current adjustment device can be provided capable of automatically adjusting bias current properly in a short period of time.
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3.发明公开Apparatus and method for depositing films on substrate via off-axis laser ablation 失效装置和方法，用于通过激光烧蚀ausserachsiale在衬底上沉积膜
公开(公告)号：EP0731188A2
公开(公告)日：1996-09-11
申请号：EP96103558.1
申请日：1996-03-07
发明人： Itozaki, Hideo , Nagaishi, Tatsuoki
CPC分类号： H01L39/2448 , C23C14/28
摘要： The apparatus for depositing thin films on both a first surface and a second surface of the substrate via off-axis laser ablation according to present invention comprises (1) a vacuum chamber (202), the vacuum chamber having (a) a first target (212a) of a first deposition material supported by a first target holder (214a), (b) a second target (212b) of a second deposition material supported by a second target holder (214b) so as to positioned to be substantially coplanar with the first target, (c) a substrate holder (210) for holding a substrate (208) above a space between the first and second targets, the substrate being oriented to be substantially perpendicular to the targets, (d) a heating means (216) for heating the first and second surfaces of the substrate, (e) a first entrance window (220a) through which a first laser beam passes to impinge onto the first target with a predetermined angle, and (f) a second entrance window (220b) through which a second laser beam passes to impinge onto the second target with a predetermined angle and (2) a laser optical system comprising at least one laser beam source (222) and an optical path system from said laser beam source to said targets, the optical path system including mirrors (224, 228) for reflecting the laser beams toward the targets through the first and second enctrance windows of the chamber.
摘要翻译： 用于在这两个第一表面和通过离轴激光烧蚀雅丁基板的第二表面上沉积薄膜，以本发明包括（1）一真空腔室（202），具有真空室（A）的第一目标（设备 212A）通过由第二靶支架（214B支持的第二沉积材料的第一靶座（214A），（b）第二目标（212B）支承的第一沉积材料），以定位成与所述基本共面的 用于保持上述第一和第二靶之间的空间的基底（208）的第一目标，（c）一种衬底保持器（210），定向基板是基本上垂直于所述的目标，（D）的加热装置（216） 用于加热衬底的第一和第二表面，（e）中，通过该第一激光束传递到撞击到第一目标以预定角度的第一入射窗（220A），和（f）的第二入射窗（220B） 其通过第二激光束传递到impin GE到具有以预定角度与所述第二目标（2）的激光光学系统，包括至少一个激光束源（222），并在从所述激光束源的光路系统到所述目标，所述光路系统，其包括反射镜（224， 228），用于通过所述腔室的第一和第二窗口enctrance反射朝向目标的激光束。
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公开(公告)号：EP1092984A3
公开(公告)日：2009-08-05
申请号：EP00402826.2
申请日：2000-10-12
IPC分类号： G01R33/035 , H01L39/22
CPC分类号： G01R33/0354 , H01L39/225
摘要： A superconducting thin film pattern (20) formed from an oxide superconducting thin film (13) is formed on a sapphire substrate (10) having a step (11) via a CeO 2 buffer layer (12), and the step (11) and superconducting thin film pattern (20) are formed such that the step (11) crosses a predetermined portion of a square thin film pattern (22) having an opening portion (23) at the central portion. Step-edge Josephson junctions (26, 27) are formed at the portion crossed by the step (11), and a SQUID (1) is obtained. The sapphire substrate (10) is relatively inexpensive, and a large substrate can be used.
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5.发明授权Apparatus and method for depositing films on substrate via off-axis laser ablation 失效装置和方法，用于通过激光烧蚀ausserachsiale在衬底上沉积膜
公开(公告)号：EP0731188B1
公开(公告)日：2000-08-23
申请号：EP96103558.1
申请日：1996-03-07
发明人： Itozaki, Hideo , Nagaishi, Tatsuoki
CPC分类号： H01L39/2448 , C23C14/28
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公开(公告)号：EP0926508A2
公开(公告)日：1999-06-30
申请号：EP98122155.9
申请日：1998-11-25
IPC分类号： G01R33/035 , H01L39/22
CPC分类号： H01L39/2496 , G01R33/0358 , Y10S505/702 , Y10S505/846
摘要： This magnetic sensor comprises a flux transformer 2 having a superconducting thin film 2f formed on a sapphire substrate 2s, and a SQUID 1 disposed on the flux transformer 2 opposite thereto. In this magnetic sensor, since the sapphire substrate 2s, which can be obtained in a large size, is used for the flux transformer 2, even when the SQUID 1 is made smaller, the magnetic flux introduced from the flux transformer 2 into the SQUID 1 can be enhanced so as to increase the effective magnetic flux capturing area, whereby the detecting performance is improved, while the manufacturing cost can be reduced due to the smaller size of the SQUID 1.
摘要翻译： 该磁传感器包括具有形成在蓝宝石衬底2s上的超导薄膜2f的磁通变换器2和与其相对的磁通变压器2上的SQUID 1。 在该磁传感器中，由于可以将大尺寸的蓝宝石基板2s用于磁通变压器2，所以即使使SQUID 1变小，从磁通变换器2导入SQUID 1的磁通量 可以增强有效磁通捕获面积，从而提高检测性能，同时由于SQUID 1的尺寸较小，可以降低制造成本。
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7.发明公开Device and method for adjusting the working point of a squid 审中-公开Vorrichtung und Verfahren zur Einstellung des Arbeitspunktes eines SQUID
公开(公告)号：EP1043597A3
公开(公告)日：2001-07-11
申请号：EP00400960.1
申请日：2000-04-07
IPC分类号： G01R33/035
CPC分类号： G01R33/0356 , Y10S505/846
摘要： A SQUID bias current adjustment device (AC SUPPLY) supplies a sinusoidal current at 40 kHz, for example, to a coil (12) to generate magnetic field at a SQUID (10). The amplitude of the field corresponds to a half period of a field-voltage characteristic. Voltage generated from the SQUID at this time is filtered by using a filter (14) to pick out components of 40 kHz and 80 kHz. The picked out signal components are rectified and converted to direct current, and the bias current is adjusted such that the maximum value is obtained. In this way, a SQUID bias current adjustment device can be provided capable of automatically adjusting bias current properly in a short period of time.
摘要翻译： SQUID偏置电流调节装置（AC SUPPLY）将例如40kHz的正弦电流提供给线圈（12），以在SQUID（10）处产生磁场。 场的幅度对应于场电压特性的半周期。 此时由SQUID产生的电压通过使用滤波器（14）进行滤波，以挑选40kHz和80kHz的分量。 拾取的信号分量被整流并转换为直流电流，并且调整偏置电流以使得获得最大值。 以这种方式，可以提供能够在短时间内适当地自动调整偏置电流的SQUID偏置电流调节装置。
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公开(公告)号：EP1092984A2
公开(公告)日：2001-04-18
申请号：EP00402826.2
申请日：2000-10-12
IPC分类号： G01R33/035 , H01L39/22
CPC分类号： G01R33/0354 , H01L39/225
摘要： A superconducting thin film pattern (20) formed from an oxide superconducting thin film (13) is formed on a sapphire substrate (10) having a step (11) via a CeO 2 buffer layer (12), and the step (11) and superconducting thin film pattern (20) are formed such that the step (11) crosses a predetermined portion of a square thin film pattern (22) having an opening portion (23) at the central portion. Step-edge Josephson junctions (26, 27) are formed at the portion crossed by the step (11), and a SQUID (1) is obtained. The sapphire substrate (10) is relatively inexpensive, and a large substrate can be used.
摘要翻译： 由氧化物超导薄膜（13）形成的超导薄膜图案（20）经由CeO 2缓冲层（12）在具有台阶（11）的蓝宝石衬底（10）上形成，并且步骤（11）和 超导薄膜图案（20）形成为使得台阶（11）在中心部分与具有开口部分（23）的方形薄膜图案（22）的预定部分交叉。 在步骤（11）交叉的部分形成步边约瑟夫逊结（26,27），得到SQUID（1）。 蓝宝石衬底（10）相对便宜，可以使用大的衬底。
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公开(公告)号：EP0926508B1
公开(公告)日：2007-08-08
申请号：EP98122155.9
申请日：1998-11-25
IPC分类号： G01R33/035 , H01L39/22
CPC分类号： H01L39/2496 , G01R33/0358 , Y10S505/702 , Y10S505/846
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10.发明公开Apparatus and method for depositing films on substrate via off-axis laser ablation 失效装置和方法，用于通过激光烧蚀ausserachsiale在衬底上沉积膜
公开(公告)号：EP0731188A3
公开(公告)日：1997-02-26
申请号：EP96103558.1
申请日：1996-03-07
发明人： Itozaki, Hideo , Nagaishi, Tatsuoki
CPC分类号： H01L39/2448 , C23C14/28
摘要： The apparatus for depositing thin films on both a first surface and a second surface of the substrate via off-axis laser ablation according to present invention comprises (1) a vacuum chamber (202), the vacuum chamber having (a) a first target (212a) of a first deposition material supported by a first target holder (214a), (b) a second target (212b) of a second deposition material supported by a second target holder (214b) so as to positioned to be substantially coplanar with the first target, (c) a substrate holder (210) for holding a substrate (208) above a space between the first and second targets, the substrate being oriented to be substantially perpendicular to the targets, (d) a heating means (216) for heating the first and second surfaces of the substrate, (e) a first entrance window (220a) through which a first laser beam passes to impinge onto the first target with a predetermined angle, and (f) a second entrance window (220b) through which a second laser beam passes to impinge onto the second target with a predetermined angle and (2) a laser optical system comprising at least one laser beam source (222) and an optical path system from said laser beam source to said targets, the optical path system including mirrors (224, 228) for reflecting the laser beams toward the targets through the first and second enctrance windows of the chamber.
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