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公开(公告)号：EP1775551B1
公开(公告)日：2013-01-23
申请号：EP05765671.2
申请日：2005-07-12
发明人： ARAKI, Ryuta c/o SUMITOMO PRECISION PRO. , TORAYASHIKI, Osamu c/o SUMITOMO PRECISION PRO. , KITAMURA, Tohru c/o SUMITOMO PRECISION PRO. , KAWASAKI, Hiroshi c/o SUMITOMO PRECISION PRO. , TAKEMOTO,Tsuyoshi c/o SUMITOMO PRECISION PRO. , NAKAMURA, Kouji c/o SUMITOMO PRECISION PRO. , FELL P. Christopher c/o BAE SYSTEMS PLC , TOWNSEND, Kevin c/o BAE SYSTEMS PLC , STURLAND, IAN c/o BAE SYSTEMS PLC, Advance Tech.
IPC分类号： G01C19/5684
CPC分类号： G01C19/5684
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公开(公告)号：EP1775551A1
公开(公告)日：2007-04-18
申请号：EP05765671.2
申请日：2005-07-12
发明人： ARAKI, Ryuta c/o SUMITOMO PRECISION PRO. , TORAYASHIKI, Osamu c/o SUMITOMO PRECISION PRO. , KITAMURA, Tohru c/o SUMITOMO PRECISION PRO. , KAWASAKI, Hiroshi c/o SUMITOMO PRECISION PRO. , TAKEMOTO,Tsuyoshi c/o SUMITOMO PRECISION PRO. , NAKAMURA, Kouji c/o SUMITOMO PRECISION PRO. , FELL P. Christopher c/o BAE SYSTEMS PLC , TOWNSEND, Kevin c/o BAE SYSTEMS PLC , STURLAND, IAN c/o BAE SYSTEMS PLC, Advance Tech.
CPC分类号： G01C19/5684
摘要： A vibrator 10, which is formed in a silicon wafer 1 by means of MEMS technique, has eight beam portions (beams) 12 supported at a central portion 11 and extending in the radial direction while mutually keeping the same angle and has a ring portion 13 connected to the eight beam portions 12. Outside the ring portion 13, eight electrodes 21a to 21h for electrostatic actuation, capacitance detection, or the like are spaced uniformly with a gap 22 created between the ring portion 13 and the electrodes 21a to 21h. Inside the ring portion 13, sixteen electrodes 23 for frequency adjustment are spaced uniformly with a gap 24 created between the ring portion 13 and the electrodes 23.
摘要翻译： 通过MEMS技术形成在硅晶片1中的振动器10具有八个在中心部分11处被支撑并且在径向方向上延伸并同时保持相同角度并且具有环形部分13的梁部分（梁）12 连接到八个光束部分12.在环部分13的外部，用于静电致动，电容检测等的八个电极21a至21h与在环部分13和电极21a至21h之间产生的间隙22均匀地间隔开。 在环部13内部，用于频率调节的十六个电极23与在环部13和电极23之间形成的间隙24均匀地间隔开。
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