-
公开(公告)号:EP4436337A1
公开(公告)日:2024-09-25
申请号:EP22895972.2
申请日:2022-11-11
IPC分类号: H10K59/00 , H01L29/786
CPC分类号: H01L27/1225 , H01L27/1255 , H01L29/78633 , H10K59/126 , H10K59/1213 , H10K59/1201 , H01L29/42384 , H01L2029/786320130101 , H01L29/78621
摘要: A display device and a manufacturing method therefor are provided. The display device comprises: a first semiconductor layer disposed on a substrate; a first gate insulation layer disposed on the first semiconductor layer; a first gate electrode disposed on the first gate insulation layer and overlapped on the first semiconductor layer; a first interlayer insulation layer disposed on the first gate electrode; a first oxide semiconductor layer disposed, on the first interlayer insulation layer, so as not to overlap on the first semiconductor layer; a second gate insulation layer disposed on the first oxide semiconductor layer; a second gate electrode disposed on the second gate insulation layer and overlapped on the first oxide semiconductor layer; a spacer disposed on the side surface of the second gate electrode; and a second interlayer insulation layer disposed on the spacer, wherein the spacer includes a first spacer disposed to be in contact with the side surface of the second gate electrode, and a second spacer disposed on the first spacer, and the concentration of hydrogen contained in the first spacer is lower than the concentration of hydrogen contained in the second spacer.