公开(公告)号：EP3945140A1

公开(公告)日：2022-02-02

申请号：EP21188407.7

申请日：2021-07-29

申请人： Samsung Display Co., Ltd.

发明人： KIM, Jeongkuk ,  KIM, Hwi ,  LEE, Areum ,  JEONG, Da-Hee ,  HWANG, Kyu Hwan ,  NAM, Kanghyun ,  JIN, Seungmin ,  HONG, Jaemin

IPC分类号： C23C14/04 ,  C23C14/22 ,  G03F1/22 ,  H01L51/00

摘要： A mask includes a mask sheet provided with a plurality of open areas defined therein in a plan view and a mask frame which supports the mask sheet. The mask sheet includes a first portion including a first surface, where the first surface is configured to be in contact with a target substrate, and a second portion disposed on the first portion, extending from a top of the first portion in a first direction and including a second surface defining the open area. The second surface is an inclined surface inclined downward with respect to the first direction, and the first direction is parallel to a plane in which the first surface is included.