CHIP TRANSFER APPARATUS
    7.
    发明公开

    公开(公告)号:EP4180124A2

    公开(公告)日:2023-05-17

    申请号:EP22174218.2

    申请日:2022-05-19

    Abstract: A chip transfer apparatus includes: a chip storage module (310) in which a plurality of micro-semiconductor chips (110) and a suspension including impurities (120) are stored; a chip filtration module (320) separating a first suspension including the plurality of micro-semiconductor chips (110) and a second suspension including the impurities (120) in the suspension; and a chip supply module (330) configured to supply the first suspension onto the transfer substrate (200) such that the first suspension is introduced from the chip filtration module (320) and the plurality of micro-semiconductor chips (110) are flowable on the transfer substrate (200).

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