Monolithic rf filter
    1.
    发明公开
    Monolithic rf filter 审中-公开
    单片射频滤波器

    公开(公告)号:EP1657817A2

    公开(公告)日:2006-05-17

    申请号:EP05024448.2

    申请日:2005-11-09

    IPC分类号: H03H9/58 H03H9/02

    摘要: A filter formed of film bulk acoustic resonators (40,42,44,48,54,56,60) has a topology that enables a trimming inductor (58) to be fabricated on the same substrate as the resonator arrays. The entire filter can be fabricated on a single chip, utilizing only integrated circuit processes. In an exemplary embodiment, a pair of shunt resonators (54,56) each have one electrode connected to series-connected resonators. The other electrodes of the two shunt resonators are connected in common to one another. The trimming inductor (58) is connected between the common electrode and ground potential. A third shunt resonator (60) is connected between the series-connected resonators and ground potential.

    摘要翻译: 由薄膜体声共振器(40,42,44,48,54,56,60)形成的滤波器具有能够将修整电感器(58)制造在与谐振器阵列相同的衬底上的拓扑结构。 整个滤波器可以在单个芯片上制造,仅利用集成电路工艺。 在示例性实施例中,一对并联谐振器(54,56)各自具有连接到串联谐振器的一个电极。 两个并联谐振器的其他电极彼此共同连接。 修整电感器(58)连接在公共电极和地电位之间。 第三并联谐振器(60)连接在串联连接的谐振器和地电位之间。