公开(公告)号：EP0552756A1

公开(公告)日：1993-07-28

申请号：EP93100881.7

申请日：1993-01-21

申请人： Shinko Electric Co. Ltd.

发明人： Kawano, Hitoshi, c/o Ise Factory ,  Okuno, Atsushi, c/o Ise Factory ,  Tsuda, Masanori, c/o Ise Factory ,  Hayashi, Mitsuhiro, c/o Ise Factory ,  Yamashita, Teppei, c/o Ise Factory ,  Murata, Masanao, c/o Ise Factory ,  Tanaka, Tsuyoshi, c/o Ise Factory ,  Norita, Teruya, c/o Ise Factory ,  Nakamura, Akio, c/o Ise Factory

IPC分类号： H01L21/00 ,  B65G1/12

CPC分类号： H01L21/67772 ,  B08B9/093 ,  H01L21/67769 ,  Y10S414/14

摘要： An article storage house (1) in a clean room for airtightly accommodating a wafer cassette (W) , etc. in which the wafer cassette(W)carried in from the outside of an article carry-in/out portion (2) is accommodated into a container (40) by an automatic article delivery unit (30) disposed in the article carry-in/out portion(2)or it is carried in the article storage house (1) while it is accommodated in the container(40) and is stored in section (S) of the article storage house (1). An inert gas purge mechanism and an automatic container cleaning portion (100) are disposed in the automatic article delivery unit (30) or each section (S).

摘要翻译： 用于气密地容纳从物品搬入/取出部分（2）的外部承载的晶片盒（W）的晶片盒（W）等的洁净室中的物品存放室（1） 通过设置在物品搬入/退出部分（2）中的自动物品输送单元（30）进入容器（40），或者它被容纳在容器（40）中的同时被运送到物品收纳室（1） 并存储在物品收纳室（1）的部分（S）中。 惰性气体吹扫机构和自动容器清洁部分（100）设置在自动物品输送单元（30）或每个部分（S）中。