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    Disk molding mold, outer peripheral ring, disk substrate, and method of molding disk substrate
    1.
    发明公开
    Disk molding mold, outer peripheral ring, disk substrate, and method of molding disk substrate 有权
    圆盘模具，外周环，盘基板和方法，用于在盘基片的模制

    公开(公告)号：EP2159033A1

    公开(公告)日：2010-03-03

    申请号：EP09010736.8

    申请日：2009-08-20

    申请人： Sumitomo Heavy Industries, LTD. ,  SEIKOH GIKEN CO., LTD.

    发明人： Suzuki, Yasuo ,  Hirano, Hideomi ,  Oike, Makoto ,  Yokota, Shouji

    IPC分类号： B29C45/26 ,  B29C45/37

    CPC分类号： B29C45/263 ,  B29C2045/2648

    摘要： The quality of a disk substrate (B1) is improved by preventing a protruding portion (m1) from being formed in the outer peripheral edge of the disk substrate.
    There are provided a first mirror plate, a second mirror plate, a stamper (61) which is mounted to one mirror plate of the first and second mirror plates, and an outer peripheral ring (37) which is mounted to the other mirror plate and has an end surface (Sk1) of an inner peripheral edge forming a cavity (C). A concave portion (22) having a depth in the range of 50 (µm) to 150 (µm) is formed in a portion of an inner peripheral surface (S2) of the outer peripheral ring forming the cavity (C). A flow layer of a molding material filled inside the cavity (C) extends in the outer radial direction by a degree corresponding to the concave portion, and the molding material in the vicinity of the outer peripheral edge of the cavity (C) and the molding material in other parts thereof are solidified in the substantially same density state.

    摘要翻译： 一盘基片（B1）的质量是通过防止在盘基片的外周缘而形成的突出部（m1）的改善。 设置有第一反射镜板，第二镜板，其被安装到第一和第二反射镜板中的一个镜板的压模（61）所有，并且外周环（37），所有这些被安装到其他镜板和 有结束的内周缘形成腔（C）的表面（SK1）。 的凹部（22）具有在50（微米）范围内的深度150（微米）在上述外周环形成空腔（C）的内周面（S2）的一部分被形成。 填充所述空腔（C）内的成型材料的流动层中的外半径方向通过一定程度的对应于所述凹部，所述模塑材料在所述空腔（C）和所述模制的外周边缘的附近延伸 在其他部分的材料其被固化以相同的密度基本上状态。