公开(公告)号：EP4368747A1

公开(公告)日：2024-05-15

申请号：EP22930431.6

申请日：2022-04-21

申请人： Suzhou Maxwell Technologies Co., Ltd. ,  Suzhou Maizheng Technology Co. Ltd

发明人： LIU, Yanan ,  ZHANG, Bin ,  CHEN, Chen ,  WANG, Dengzhi ,  LIU, Huan

IPC分类号： C23C16/513 ,  C23C16/455

CPC分类号： Y02P70/50

摘要： The present invention belongs to the technical field of PECVD devices. Disclosed are a drooping cover plate and a PECVD device having the drooping cover plate. In the drooping cover plate of the present invention, a first insulating frame is arranged on a bottom plate frame, and a second insulating frame is arranged on the first insulating frame; the bottom plate frame is formed of several bottom plates connected to each other, a lower side face of each bottom plate is provided with an extension portion that is perpendicular to the lower side face of the bottom plate; the first insulating frame is formed of several first insulating plates joined together, and the second insulating frame is formed of several second insulating plates joined together; and several strip-shaped holes communicating an inner side and an outer side of the bottom plate frame are formed between upper side surfaces of the bottom plates and lower side surfaces of the first insulating plates and between upper side surfaces of the first insulating plates and lower side surfaces of the second insulating plates, and the height of each strip-shaped hole in a thickness direction of the bottom plate frame is 1-20 mm. The drooping cover plate in the present embodiment can greatly improve the processing efficiency and yield of a vacuum deposition process.