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公开(公告)号：EP1247089A1
公开(公告)日：2002-10-09
申请号：EP00992511.6
申请日：2000-11-15
发明人： DAI, Hongjie , KONG, Jing
IPC分类号： G01N27/12
CPC分类号： G01N27/127 , B82Y15/00 , B82Y30/00
摘要： The invention provides an assembly of novel nanotube devices that can be employed in a variety of applications. In particular, the nanotube devices of the present invention provide a new class of versatile chemical and biological sensors. The device includes a nanotube (20) disposed between two catalyst islands (21) on a substrate (22). Two metal electrodes (23) are made to fully cover respective catalyst islands, including the two ends (24) of the bridging nanotube.
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2.发明公开
公开(公告)号：EP1131838A1
公开(公告)日：2001-09-12
申请号：EP99972363.8
申请日：1999-11-04
CPC分类号： H01J9/025 , B82Y10/00 , B82Y30/00 , B82Y40/00 , C01B32/162 , C01B2202/06 , C01B2202/08 , H01J1/304 , H01J2201/30469 , Y10S977/939
摘要： A field emission device (20) having bundles (28) of aligned parallel carbon nanotubes on a substrate (22). The carbon nanotubes (28) are oriented perpendicular to the substrate (22). The carbon nanotube bundles (28) may be up to 300 microns tall, for example. The bundles (28) of carbon nanotubes extend only from regions of the substrate (22) patterned with a catalyst material (26). Preferably, the catalyst material (26) is iron oxide. The substrate (22) is preferably porous silicon, as this produces the highest quality, most well-aligned nanotubes. Smooth, nonporous silicon or quartz can also be used as the substrate. The method of the invention starts with forming a porous layer on a silicon substrate by electrochemical etching. Then, a thin layer of iron is deposited on the porous layer in patterned regions. The iron is then oxidized into iron oxide, and then the substrate is exposed to ethylene gas at elevated temperature. The iron oxide catalyzes the formation of bundles of temperature. The iron oxide catalyses the formation of bundles of aligned parallel carbon nanotubes which grow perpendicular to the substrate surface. The height of the nanotube bundles above the substrate is determined by the duration of the catalysis step. The nanotube bundles only grow from the patterned regions.
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