METHOD FOR CONTROLLING AN AMOUNT OF MATERIAL DELIVERED DURING A MATERIAL TRANSFER
    1.
    发明公开
    METHOD FOR CONTROLLING AN AMOUNT OF MATERIAL DELIVERED DURING A MATERIAL TRANSFER 有权
    控制程序赞助的物量过程中的物质支持

    公开(公告)号:EP1234163A1

    公开(公告)日:2002-08-28

    申请号:EP00980737.1

    申请日:2000-11-22

    IPC分类号: G01G13/12 G01G13/285

    CPC分类号: G01G13/2857 G01G13/12

    摘要: A method for controlling an amount of material delivered during a material transfer. This method includes the steps of inputting a target amount for a material to be delivered from a source location to a target location, updating the target amount during the delivery of the material using a predictive model-based algorithm, and updating the predictive model-based algorithm based on process performance data using a recursive least-squares procedure. An adaptive selection algorithm which is used to determine whether at least one previous predictive model-based algorithm parameter should be replaced with at least one new predictive model-based algorithm parameter in order to adapt the predictive model-based algorithm in response to a process change. A method for overlapping a delivery of at least one independently measured material with a delivery of a main material during a material transfer process.

    METHOD FOR CONTROLLING AN AMOUNT OF MATERIAL DELIVERED DURING A MATERIAL TRANSFER
    2.
    发明授权
    METHOD FOR CONTROLLING AN AMOUNT OF MATERIAL DELIVERED DURING A MATERIAL TRANSFER 有权
    控制程序赞助的物量过程中的物质支持

    公开(公告)号:EP1234163B1

    公开(公告)日:2009-09-16

    申请号:EP00980737.1

    申请日:2000-11-22

    IPC分类号: G01G13/12 G01G13/285

    CPC分类号: G01G13/2857 G01G13/12

    摘要: A method for controlling an amount of material delivered during a material transfer. This method includes the steps of inputting a target amount for a material to be delivered from a source location to a target location, updating the target amount during the delivery of the material using a predictive model-based algorithm, and updating the predictive model-based algorithm based on process performance data using a recursive least-squares procedure. An adaptive selection algorithm which is used to determine whether at least one previous predictive model-based algorithm parameter should be replaced with at least one new predictive model-based algorithm parameter in order to adapt the predictive model-based algorithm in response to a process change. A method for overlapping a delivery of at least one independently measured material with a delivery of a main material during a material transfer process.